3/22/2010	10:01:09 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/22/2010	10:01:10 AM	Recipe started at 10:01 AM
3/22/2010	10:01:10 AM	H2 valve closed
3/22/2010	10:01:10 AM	BCl3 valve closed
3/22/2010	10:01:10 AM	PH3 valve closed
3/22/2010	10:01:10 AM	SiCl4 pre valve closed
3/22/2010	10:01:10 AM	SiCl4 post valve closed
3/22/2010	10:01:10 AM	Main Vac valve closed
3/22/2010	10:01:10 AM	Bypass valve closed
3/22/2010	10:01:10 AM	Bubbler valve closed
3/22/2010	10:01:10 AM	Helium valve opened
3/22/2010	10:01:10 AM	Helium MFC set to  500.000000
3/22/2010	10:01:10 AM	H2 MFC set to  0.000000
3/22/2010	10:01:10 AM	BCl3 MFC set to  0.000000
3/22/2010	10:01:10 AM	SiCl4 MFC set to  0.000000
3/22/2010	10:01:10 AM	Bypass solenoid MFC set to  0.000000
3/22/2010	10:01:10 AM	Tube furnace set to 0
3/22/2010	10:02:32 AM	Helium valve closed
3/22/2010	10:02:32 AM	H2 valve closed
3/22/2010	10:02:32 AM	BCl3 valve closed
3/22/2010	10:02:32 AM	PH3 valve closed
3/22/2010	10:02:32 AM	SiCl4 pre valve closed
3/22/2010	10:02:32 AM	SiCl4 post valve closed
3/22/2010	10:02:32 AM	Main Vac valve closed
3/22/2010	10:02:32 AM	Bypass valve closed
3/22/2010	10:02:32 AM	Bubbler valve closed
3/22/2010	10:02:32 AM	Helium MFC set to  0.000000
3/22/2010	10:02:32 AM	H2 MFC set to  0.000000
3/22/2010	10:02:32 AM	BCl3 MFC set to  0.000000
3/22/2010	10:02:32 AM	SiCl4 MFC set to  0.000000
3/22/2010	10:02:32 AM	Bypass solenoid MFC set to  0.000000
3/22/2010	10:02:32 AM	Tube furnace set to 0
3/22/2010	10:02:32 AM	Run finished at 10:02 AM
3/22/2010	10:02:32 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/22/2010	10:13:41 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2010	10:13:41 AM	Recipe started at 10:13 AM
3/22/2010	10:13:41 AM	Helium valve closed
3/22/2010	10:13:41 AM	H2 valve closed
3/22/2010	10:13:41 AM	BCl3 valve closed
3/22/2010	10:13:41 AM	PH3 valve closed
3/22/2010	10:13:41 AM	SiCl4 pre valve closed
3/22/2010	10:13:41 AM	SiCl4 post valve closed
3/22/2010	10:13:41 AM	Main Vac valve closed
3/22/2010	10:13:41 AM	Bubbler valve closed
3/22/2010	10:13:41 AM	Bypass valve opened
3/22/2010	10:13:41 AM	Helium MFC set to  0.000000
3/22/2010	10:13:41 AM	H2 MFC set to  0.000000
3/22/2010	10:13:41 AM	BCl3 MFC set to  0.000000
3/22/2010	10:13:41 AM	SiCl4 MFC set to  0.000000
3/22/2010	10:13:41 AM	Bypass solenoid MFC set to  0.000000
3/22/2010	10:13:41 AM	Tube furnace set to 0
3/22/2010	10:14:13 AM	Helium valve closed
3/22/2010	10:14:13 AM	H2 valve closed
3/22/2010	10:14:13 AM	BCl3 valve closed
3/22/2010	10:14:13 AM	PH3 valve closed
3/22/2010	10:14:13 AM	SiCl4 pre valve closed
3/22/2010	10:14:13 AM	SiCl4 post valve closed
3/22/2010	10:14:13 AM	Bubbler valve closed
3/22/2010	10:14:13 AM	Main Vac valve opened
3/22/2010	10:14:13 AM	Bypass valve opened
3/22/2010	10:14:13 AM	Helium MFC set to  0.000000
3/22/2010	10:14:13 AM	H2 MFC set to  0.000000
3/22/2010	10:14:13 AM	BCl3 MFC set to  0.000000
3/22/2010	10:14:13 AM	SiCl4 MFC set to  0.000000
3/22/2010	10:14:13 AM	Bypass solenoid MFC set to  0.000000
3/22/2010	10:14:13 AM	Tube furnace set to 0
3/22/2010	10:14:13 AM	Run finished at 10:14 AM
3/22/2010	10:14:13 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2010	10:14:49 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/22/2010	10:14:50 AM	Recipe started at 10:14 AM
3/22/2010	10:14:50 AM	H2 valve closed
3/22/2010	10:14:50 AM	BCl3 valve closed
3/22/2010	10:14:50 AM	PH3 valve closed
3/22/2010	10:14:50 AM	SiCl4 pre valve closed
3/22/2010	10:14:50 AM	SiCl4 post valve closed
3/22/2010	10:14:50 AM	Main Vac valve closed
3/22/2010	10:14:50 AM	Bypass valve closed
3/22/2010	10:14:50 AM	Bubbler valve closed
3/22/2010	10:14:50 AM	Helium valve opened
3/22/2010	10:14:50 AM	Helium MFC set to  500.000000
3/22/2010	10:14:50 AM	H2 MFC set to  0.000000
3/22/2010	10:14:50 AM	BCl3 MFC set to  0.000000
3/22/2010	10:14:50 AM	SiCl4 MFC set to  0.000000
3/22/2010	10:14:50 AM	Bypass solenoid MFC set to  0.000000
3/22/2010	10:14:50 AM	Tube furnace set to 0
3/22/2010	10:16:10 AM	Helium valve closed
3/22/2010	10:16:10 AM	H2 valve closed
3/22/2010	10:16:10 AM	BCl3 valve closed
3/22/2010	10:16:10 AM	PH3 valve closed
3/22/2010	10:16:10 AM	SiCl4 pre valve closed
3/22/2010	10:16:10 AM	SiCl4 post valve closed
3/22/2010	10:16:10 AM	Main Vac valve closed
3/22/2010	10:16:10 AM	Bypass valve closed
3/22/2010	10:16:10 AM	Bubbler valve closed
3/22/2010	10:16:10 AM	Helium MFC set to  0.000000
3/22/2010	10:16:10 AM	H2 MFC set to  0.000000
3/22/2010	10:16:11 AM	BCl3 MFC set to  0.000000
3/22/2010	10:16:11 AM	SiCl4 MFC set to  0.000000
3/22/2010	10:16:11 AM	Bypass solenoid MFC set to  0.000000
3/22/2010	10:16:11 AM	Tube furnace set to 0
3/22/2010	10:16:11 AM	Run finished at 10:16 AM
3/22/2010	10:16:11 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/22/2010	10:17:03 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2010	10:17:03 AM	Recipe started at 10:17 AM
3/22/2010	10:17:03 AM	Helium valve closed
3/22/2010	10:17:03 AM	H2 valve closed
3/22/2010	10:17:03 AM	BCl3 valve closed
3/22/2010	10:17:03 AM	PH3 valve closed
3/22/2010	10:17:03 AM	SiCl4 pre valve closed
3/22/2010	10:17:03 AM	SiCl4 post valve closed
3/22/2010	10:17:03 AM	Main Vac valve closed
3/22/2010	10:17:03 AM	Bubbler valve closed
3/22/2010	10:17:03 AM	Bypass valve opened
3/22/2010	10:17:03 AM	Helium MFC set to  0.000000
3/22/2010	10:17:03 AM	H2 MFC set to  0.000000
3/22/2010	10:17:03 AM	BCl3 MFC set to  0.000000
3/22/2010	10:17:03 AM	SiCl4 MFC set to  0.000000
3/22/2010	10:17:03 AM	Bypass solenoid MFC set to  0.000000
3/22/2010	10:17:03 AM	Tube furnace set to 0
3/22/2010	10:17:25 AM	Helium valve closed
3/22/2010	10:17:25 AM	H2 valve closed
3/22/2010	10:17:25 AM	BCl3 valve closed
3/22/2010	10:17:25 AM	PH3 valve closed
3/22/2010	10:17:25 AM	SiCl4 pre valve closed
3/22/2010	10:17:25 AM	SiCl4 post valve closed
3/22/2010	10:17:25 AM	Bubbler valve closed
3/22/2010	10:17:25 AM	Main Vac valve opened
3/22/2010	10:17:25 AM	Bypass valve opened
3/22/2010	10:17:25 AM	Helium MFC set to  0.000000
3/22/2010	10:17:25 AM	H2 MFC set to  0.000000
3/22/2010	10:17:25 AM	BCl3 MFC set to  0.000000
3/22/2010	10:17:25 AM	SiCl4 MFC set to  0.000000
3/22/2010	10:17:25 AM	Bypass solenoid MFC set to  0.000000
3/22/2010	10:17:25 AM	Tube furnace set to 0
3/22/2010	10:17:26 AM	Run finished at 10:17 AM
3/22/2010	10:17:26 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2010	10:21:14 AM	Helium valve opened
3/22/2010	10:21:15 AM	Helium valve closed
3/22/2010	10:21:24 AM	Helium MFC set to  100.000000
3/22/2010	10:21:25 AM	Helium valve opened
3/22/2010	10:21:42 AM	Helium valve closed
3/22/2010	10:22:24 AM	Helium valve opened
3/22/2010	10:23:31 AM	Helium valve closed
3/22/2010	10:24:15 AM	Helium valve opened
3/22/2010	10:25:42 AM	Helium valve closed
3/22/2010	10:25:50 AM	Helium MFC set to  0.000000
3/22/2010	10:27:59 AM	Main Vac valve closed
3/22/2010	10:28:00 AM	Bypass valve closed
3/22/2010	10:28:25 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2010	10:28:26 AM	Recipe started at 10:28 AM
3/22/2010	10:28:26 AM	Helium valve closed
3/22/2010	10:28:26 AM	H2 valve closed
3/22/2010	10:28:26 AM	BCl3 valve closed
3/22/2010	10:28:26 AM	PH3 valve closed
3/22/2010	10:28:26 AM	SiCl4 pre valve closed
3/22/2010	10:28:26 AM	SiCl4 post valve closed
3/22/2010	10:28:26 AM	Main Vac valve closed
3/22/2010	10:28:26 AM	Bubbler valve closed
3/22/2010	10:28:26 AM	Bypass valve opened
3/22/2010	10:28:26 AM	Helium MFC set to  0.000000
3/22/2010	10:28:26 AM	H2 MFC set to  0.000000
3/22/2010	10:28:26 AM	BCl3 MFC set to  0.000000
3/22/2010	10:28:26 AM	SiCl4 MFC set to  0.000000
3/22/2010	10:28:26 AM	Bypass solenoid MFC set to  0.000000
3/22/2010	10:28:26 AM	Tube furnace set to 0
3/22/2010	10:28:26 AM	Helium valve closed
3/22/2010	10:28:26 AM	H2 valve closed
3/22/2010	10:28:26 AM	BCl3 valve closed
3/22/2010	10:28:26 AM	PH3 valve closed
3/22/2010	10:28:26 AM	SiCl4 pre valve closed
3/22/2010	10:28:26 AM	SiCl4 post valve closed
3/22/2010	10:28:26 AM	Bubbler valve closed
3/22/2010	10:28:26 AM	Main Vac valve opened
3/22/2010	10:28:26 AM	Bypass valve opened
3/22/2010	10:28:26 AM	Helium MFC set to  0.000000
3/22/2010	10:28:26 AM	H2 MFC set to  0.000000
3/22/2010	10:28:26 AM	BCl3 MFC set to  0.000000
3/22/2010	10:28:26 AM	SiCl4 MFC set to  0.000000
3/22/2010	10:28:26 AM	Bypass solenoid MFC set to  0.000000
3/22/2010	10:28:26 AM	Tube furnace set to 0
3/22/2010	10:28:27 AM	Run finished at 10:28 AM
3/22/2010	10:28:27 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2010	10:28:37 AM	Helium MFC set to  100.000000
3/22/2010	10:28:39 AM	Helium valve opened
3/22/2010	10:29:06 AM	Helium valve closed
3/22/2010	10:29:11 AM	Helium MFC set to  0.000000
3/22/2010	10:30:28 AM	Recipe started at 10:30 AM
3/22/2010	10:30:28 AM	Helium valve closed
3/22/2010	10:30:28 AM	BCl3 valve closed
3/22/2010	10:30:28 AM	PH3 valve closed
3/22/2010	10:30:28 AM	SiCl4 pre valve closed
3/22/2010	10:30:28 AM	SiCl4 post valve closed
3/22/2010	10:30:28 AM	Main Vac valve closed
3/22/2010	10:30:28 AM	Bypass valve closed
3/22/2010	10:30:28 AM	Bubbler valve closed
3/22/2010	10:30:28 AM	H2 valve opened
3/22/2010	10:30:28 AM	Helium MFC set to  0.000000
3/22/2010	10:30:28 AM	H2 MFC set to  500.000000
3/22/2010	10:30:28 AM	BCl3 MFC set to  0.000000
3/22/2010	10:30:28 AM	SiCl4 MFC set to  0.000000
3/22/2010	10:30:28 AM	Bypass solenoid MFC set to  0.000000
3/22/2010	10:30:28 AM	Tube furnace set to 0
3/22/2010	10:31:51 AM	Helium valve closed
3/22/2010	10:31:51 AM	BCl3 valve closed
3/22/2010	10:31:51 AM	PH3 valve closed
3/22/2010	10:31:51 AM	SiCl4 pre valve closed
3/22/2010	10:31:51 AM	SiCl4 post valve closed
3/22/2010	10:31:51 AM	Main Vac valve closed
3/22/2010	10:31:51 AM	Bypass valve closed
3/22/2010	10:31:51 AM	H2 valve opened
3/22/2010	10:31:51 AM	Bubbler valve opened
3/22/2010	10:31:51 AM	Helium MFC set to  0.000000
3/22/2010	10:31:51 AM	H2 MFC set to  500.000000
3/22/2010	10:31:51 AM	BCl3 MFC set to  0.000000
3/22/2010	10:31:51 AM	SiCl4 MFC set to  0.000000
3/22/2010	10:31:51 AM	Bypass solenoid MFC set to  0.000000
3/22/2010	10:31:51 AM	Tube furnace set to 0
3/22/2010	10:51:51 AM	Helium valve closed
3/22/2010	10:51:51 AM	PH3 valve closed
3/22/2010	10:51:51 AM	Main Vac valve closed
3/22/2010	10:51:51 AM	Bypass valve closed
3/22/2010	10:51:51 AM	H2 valve opened
3/22/2010	10:51:51 AM	BCl3 valve opened
3/22/2010	10:51:51 AM	SiCl4 pre valve opened
3/22/2010	10:51:51 AM	SiCl4 post valve opened
3/22/2010	10:51:51 AM	Bubbler valve opened
3/22/2010	10:51:51 AM	Helium MFC set to  0.000000
3/22/2010	10:51:51 AM	H2 MFC set to  500.000000
3/22/2010	10:51:51 AM	BCl3 MFC set to  35.000000
3/22/2010	10:51:51 AM	SiCl4 MFC set to  400.000000
3/22/2010	10:51:51 AM	Bypass solenoid MFC set to  0.000000
3/22/2010	10:51:51 AM	Tube furnace set to 0
3/22/2010	11:11:51 AM	H2 valve closed
3/22/2010	11:11:51 AM	BCl3 valve closed
3/22/2010	11:11:51 AM	PH3 valve closed
3/22/2010	11:11:51 AM	SiCl4 pre valve closed
3/22/2010	11:11:51 AM	SiCl4 post valve closed
3/22/2010	11:11:52 AM	Main Vac valve closed
3/22/2010	11:11:52 AM	Bypass valve closed
3/22/2010	11:11:52 AM	Helium valve opened
3/22/2010	11:11:52 AM	Bubbler valve opened
3/22/2010	11:11:52 AM	Helium MFC set to  500.000000
3/22/2010	11:11:52 AM	H2 MFC set to  0.000000
3/22/2010	11:11:52 AM	BCl3 MFC set to  0.000000
3/22/2010	11:11:52 AM	SiCl4 MFC set to  0.000000
3/22/2010	11:11:52 AM	Bypass solenoid MFC set to  0.000000
3/22/2010	11:11:52 AM	Tube furnace set to 0
3/22/2010	11:31:52 AM	Helium valve closed
3/22/2010	11:31:52 AM	H2 valve closed
3/22/2010	11:31:52 AM	BCl3 valve closed
3/22/2010	11:31:52 AM	PH3 valve closed
3/22/2010	11:31:52 AM	SiCl4 pre valve closed
3/22/2010	11:31:52 AM	SiCl4 post valve closed
3/22/2010	11:31:52 AM	Main Vac valve closed
3/22/2010	11:31:52 AM	Bypass valve closed
3/22/2010	11:31:52 AM	Bubbler valve closed
3/22/2010	11:31:52 AM	Helium MFC set to  0.000000
3/22/2010	11:31:52 AM	H2 MFC set to  0.000000
3/22/2010	11:31:52 AM	BCl3 MFC set to  0.000000
3/22/2010	11:31:52 AM	SiCl4 MFC set to  0.000000
3/22/2010	11:31:52 AM	Bypass solenoid MFC set to  0.000000
3/22/2010	11:31:52 AM	Tube furnace set to 0
3/22/2010	11:31:52 AM	Run finished at 11:31 AM
3/22/2010	11:40:08 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2010	11:40:08 AM	Recipe started at 11:40 AM
3/22/2010	11:40:08 AM	Helium valve closed
3/22/2010	11:40:08 AM	H2 valve closed
3/22/2010	11:40:08 AM	BCl3 valve closed
3/22/2010	11:40:08 AM	PH3 valve closed
3/22/2010	11:40:08 AM	SiCl4 pre valve closed
3/22/2010	11:40:08 AM	SiCl4 post valve closed
3/22/2010	11:40:08 AM	Main Vac valve closed
3/22/2010	11:40:08 AM	Bubbler valve closed
3/22/2010	11:40:08 AM	Bypass valve opened
3/22/2010	11:40:08 AM	Helium MFC set to  0.000000
3/22/2010	11:40:08 AM	H2 MFC set to  0.000000
3/22/2010	11:40:08 AM	BCl3 MFC set to  0.000000
3/22/2010	11:40:08 AM	SiCl4 MFC set to  0.000000
3/22/2010	11:40:08 AM	Bypass solenoid MFC set to  0.000000
3/22/2010	11:40:08 AM	Tube furnace set to 0
3/22/2010	11:40:40 AM	Helium valve closed
3/22/2010	11:40:40 AM	H2 valve closed
3/22/2010	11:40:40 AM	BCl3 valve closed
3/22/2010	11:40:40 AM	PH3 valve closed
3/22/2010	11:40:40 AM	SiCl4 pre valve closed
3/22/2010	11:40:40 AM	SiCl4 post valve closed
3/22/2010	11:40:40 AM	Bubbler valve closed
3/22/2010	11:40:40 AM	Main Vac valve opened
3/22/2010	11:40:40 AM	Bypass valve opened
3/22/2010	11:40:40 AM	Helium MFC set to  0.000000
3/22/2010	11:40:40 AM	H2 MFC set to  0.000000
3/22/2010	11:40:40 AM	BCl3 MFC set to  0.000000
3/22/2010	11:40:40 AM	SiCl4 MFC set to  0.000000
3/22/2010	11:40:40 AM	Bypass solenoid MFC set to  0.000000
3/22/2010	11:40:40 AM	Tube furnace set to 0
3/22/2010	11:40:40 AM	Run finished at 11:40 AM
3/22/2010	11:40:40 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2010	11:41:28 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/22/2010	11:41:29 AM	Recipe started at 11:41 AM
3/22/2010	11:41:29 AM	H2 valve closed
3/22/2010	11:41:29 AM	BCl3 valve closed
3/22/2010	11:41:29 AM	PH3 valve closed
3/22/2010	11:41:29 AM	SiCl4 pre valve closed
3/22/2010	11:41:29 AM	SiCl4 post valve closed
3/22/2010	11:41:29 AM	Main Vac valve closed
3/22/2010	11:41:29 AM	Bypass valve closed
3/22/2010	11:41:29 AM	Bubbler valve closed
3/22/2010	11:41:29 AM	Helium valve opened
3/22/2010	11:41:29 AM	Helium MFC set to  500.000000
3/22/2010	11:41:29 AM	H2 MFC set to  0.000000
3/22/2010	11:41:29 AM	BCl3 MFC set to  0.000000
3/22/2010	11:41:29 AM	SiCl4 MFC set to  0.000000
3/22/2010	11:41:29 AM	Bypass solenoid MFC set to  0.000000
3/22/2010	11:41:29 AM	Tube furnace set to 0
3/22/2010	11:42:48 AM	Helium valve closed
3/22/2010	11:42:48 AM	H2 valve closed
3/22/2010	11:42:48 AM	BCl3 valve closed
3/22/2010	11:42:48 AM	PH3 valve closed
3/22/2010	11:42:48 AM	SiCl4 pre valve closed
3/22/2010	11:42:48 AM	SiCl4 post valve closed
3/22/2010	11:42:48 AM	Main Vac valve closed
3/22/2010	11:42:48 AM	Bypass valve closed
3/22/2010	11:42:48 AM	Bubbler valve closed
3/22/2010	11:42:48 AM	Helium MFC set to  0.000000
3/22/2010	11:42:48 AM	H2 MFC set to  0.000000
3/22/2010	11:42:48 AM	BCl3 MFC set to  0.000000
3/22/2010	11:42:48 AM	SiCl4 MFC set to  0.000000
3/22/2010	11:42:48 AM	Bypass solenoid MFC set to  0.000000
3/22/2010	11:42:48 AM	Tube furnace set to 0
3/22/2010	11:42:48 AM	Run finished at 11:42 AM
3/22/2010	11:42:48 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/22/2010	11:42:54 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2010	11:42:55 AM	Recipe started at 11:42 AM
3/22/2010	11:42:55 AM	Helium valve closed
3/22/2010	11:42:55 AM	H2 valve closed
3/22/2010	11:42:55 AM	BCl3 valve closed
3/22/2010	11:42:55 AM	PH3 valve closed
3/22/2010	11:42:55 AM	SiCl4 pre valve closed
3/22/2010	11:42:55 AM	SiCl4 post valve closed
3/22/2010	11:42:55 AM	Main Vac valve closed
3/22/2010	11:42:55 AM	Bubbler valve closed
3/22/2010	11:42:55 AM	Bypass valve opened
3/22/2010	11:42:55 AM	Helium MFC set to  0.000000
3/22/2010	11:42:55 AM	H2 MFC set to  0.000000
3/22/2010	11:42:55 AM	BCl3 MFC set to  0.000000
3/22/2010	11:42:55 AM	SiCl4 MFC set to  0.000000
3/22/2010	11:42:55 AM	Bypass solenoid MFC set to  0.000000
3/22/2010	11:42:55 AM	Tube furnace set to 0
3/22/2010	11:43:16 AM	Helium valve closed
3/22/2010	11:43:16 AM	H2 valve closed
3/22/2010	11:43:16 AM	BCl3 valve closed
3/22/2010	11:43:16 AM	PH3 valve closed
3/22/2010	11:43:16 AM	SiCl4 pre valve closed
3/22/2010	11:43:16 AM	SiCl4 post valve closed
3/22/2010	11:43:16 AM	Bubbler valve closed
3/22/2010	11:43:16 AM	Main Vac valve opened
3/22/2010	11:43:16 AM	Bypass valve opened
3/22/2010	11:43:16 AM	Helium MFC set to  0.000000
3/22/2010	11:43:16 AM	H2 MFC set to  0.000000
3/22/2010	11:43:16 AM	BCl3 MFC set to  0.000000
3/22/2010	11:43:16 AM	SiCl4 MFC set to  0.000000
3/22/2010	11:43:16 AM	Bypass solenoid MFC set to  0.000000
3/22/2010	11:43:16 AM	Tube furnace set to 0
3/22/2010	11:43:17 AM	Run finished at 11:43 AM
3/22/2010	11:43:17 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2010	11:46:47 AM	Helium MFC set to  100.000000
3/22/2010	11:46:48 AM	Helium valve opened
3/22/2010	12:06:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/22/2010	12:06:04 PM	Recipe started at 12:06 PM
3/22/2010	12:06:04 PM	H2 valve closed
3/22/2010	12:06:04 PM	BCl3 valve closed
3/22/2010	12:06:04 PM	PH3 valve closed
3/22/2010	12:06:04 PM	SiCl4 pre valve closed
3/22/2010	12:06:04 PM	SiCl4 post valve closed
3/22/2010	12:06:04 PM	Main Vac valve closed
3/22/2010	12:06:04 PM	Bypass valve closed
3/22/2010	12:06:04 PM	Bubbler valve closed
3/22/2010	12:06:04 PM	Helium valve opened
3/22/2010	12:06:04 PM	Helium MFC set to  500.000000
3/22/2010	12:06:04 PM	H2 MFC set to  0.000000
3/22/2010	12:06:04 PM	BCl3 MFC set to  0.000000
3/22/2010	12:06:04 PM	SiCl4 MFC set to  0.000000
3/22/2010	12:06:04 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	12:06:04 PM	Tube furnace set to 0
3/22/2010	12:07:25 PM	Helium valve closed
3/22/2010	12:07:25 PM	H2 valve closed
3/22/2010	12:07:25 PM	BCl3 valve closed
3/22/2010	12:07:25 PM	PH3 valve closed
3/22/2010	12:07:25 PM	SiCl4 pre valve closed
3/22/2010	12:07:25 PM	SiCl4 post valve closed
3/22/2010	12:07:25 PM	Main Vac valve closed
3/22/2010	12:07:25 PM	Bypass valve closed
3/22/2010	12:07:25 PM	Bubbler valve closed
3/22/2010	12:07:25 PM	Helium MFC set to  0.000000
3/22/2010	12:07:25 PM	H2 MFC set to  0.000000
3/22/2010	12:07:25 PM	BCl3 MFC set to  0.000000
3/22/2010	12:07:25 PM	SiCl4 MFC set to  0.000000
3/22/2010	12:07:25 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	12:07:25 PM	Tube furnace set to 0
3/22/2010	12:07:25 PM	Run finished at 12:07 PM
3/22/2010	12:07:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/22/2010	12:16:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2010	12:16:40 PM	Recipe started at 12:16 PM
3/22/2010	12:16:40 PM	Helium valve closed
3/22/2010	12:16:40 PM	H2 valve closed
3/22/2010	12:16:40 PM	BCl3 valve closed
3/22/2010	12:16:40 PM	PH3 valve closed
3/22/2010	12:16:40 PM	SiCl4 pre valve closed
3/22/2010	12:16:40 PM	SiCl4 post valve closed
3/22/2010	12:16:40 PM	Main Vac valve closed
3/22/2010	12:16:40 PM	Bubbler valve closed
3/22/2010	12:16:40 PM	Bypass valve opened
3/22/2010	12:16:40 PM	Helium MFC set to  0.000000
3/22/2010	12:16:40 PM	H2 MFC set to  0.000000
3/22/2010	12:16:40 PM	BCl3 MFC set to  0.000000
3/22/2010	12:16:40 PM	SiCl4 MFC set to  0.000000
3/22/2010	12:16:40 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	12:16:40 PM	Tube furnace set to 0
3/22/2010	12:17:11 PM	Helium valve closed
3/22/2010	12:17:11 PM	H2 valve closed
3/22/2010	12:17:11 PM	BCl3 valve closed
3/22/2010	12:17:11 PM	PH3 valve closed
3/22/2010	12:17:11 PM	SiCl4 pre valve closed
3/22/2010	12:17:11 PM	SiCl4 post valve closed
3/22/2010	12:17:11 PM	Bubbler valve closed
3/22/2010	12:17:11 PM	Main Vac valve opened
3/22/2010	12:17:11 PM	Bypass valve opened
3/22/2010	12:17:11 PM	Helium MFC set to  0.000000
3/22/2010	12:17:11 PM	H2 MFC set to  0.000000
3/22/2010	12:17:11 PM	BCl3 MFC set to  0.000000
3/22/2010	12:17:11 PM	SiCl4 MFC set to  0.000000
3/22/2010	12:17:11 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	12:17:11 PM	Tube furnace set to 0
3/22/2010	12:17:11 PM	Run finished at 12:17 PM
3/22/2010	12:17:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2010	12:17:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/22/2010	12:17:28 PM	Recipe started at 12:17 PM
3/22/2010	12:17:28 PM	H2 valve closed
3/22/2010	12:17:28 PM	BCl3 valve closed
3/22/2010	12:17:28 PM	PH3 valve closed
3/22/2010	12:17:28 PM	SiCl4 pre valve closed
3/22/2010	12:17:28 PM	SiCl4 post valve closed
3/22/2010	12:17:28 PM	Main Vac valve closed
3/22/2010	12:17:28 PM	Bypass valve closed
3/22/2010	12:17:28 PM	Bubbler valve closed
3/22/2010	12:17:28 PM	Helium valve opened
3/22/2010	12:17:28 PM	Helium MFC set to  500.000000
3/22/2010	12:17:28 PM	H2 MFC set to  0.000000
3/22/2010	12:17:28 PM	BCl3 MFC set to  0.000000
3/22/2010	12:17:28 PM	SiCl4 MFC set to  0.000000
3/22/2010	12:17:28 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	12:17:28 PM	Tube furnace set to 0
3/22/2010	12:18:48 PM	Helium valve closed
3/22/2010	12:18:48 PM	H2 valve closed
3/22/2010	12:18:48 PM	BCl3 valve closed
3/22/2010	12:18:48 PM	PH3 valve closed
3/22/2010	12:18:48 PM	SiCl4 pre valve closed
3/22/2010	12:18:48 PM	SiCl4 post valve closed
3/22/2010	12:18:48 PM	Main Vac valve closed
3/22/2010	12:18:48 PM	Bypass valve closed
3/22/2010	12:18:48 PM	Bubbler valve closed
3/22/2010	12:18:48 PM	Helium MFC set to  0.000000
3/22/2010	12:18:48 PM	H2 MFC set to  0.000000
3/22/2010	12:18:48 PM	BCl3 MFC set to  0.000000
3/22/2010	12:18:48 PM	SiCl4 MFC set to  0.000000
3/22/2010	12:18:48 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	12:18:48 PM	Tube furnace set to 0
3/22/2010	12:18:48 PM	Run finished at 12:18 PM
3/22/2010	12:18:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/22/2010	12:20:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2010	12:20:01 PM	Recipe started at 12:20 PM
3/22/2010	12:20:01 PM	Helium valve closed
3/22/2010	12:20:01 PM	H2 valve closed
3/22/2010	12:20:01 PM	BCl3 valve closed
3/22/2010	12:20:01 PM	PH3 valve closed
3/22/2010	12:20:01 PM	SiCl4 pre valve closed
3/22/2010	12:20:01 PM	SiCl4 post valve closed
3/22/2010	12:20:01 PM	Main Vac valve closed
3/22/2010	12:20:01 PM	Bubbler valve closed
3/22/2010	12:20:01 PM	Bypass valve opened
3/22/2010	12:20:01 PM	Helium MFC set to  0.000000
3/22/2010	12:20:01 PM	H2 MFC set to  0.000000
3/22/2010	12:20:01 PM	BCl3 MFC set to  0.000000
3/22/2010	12:20:01 PM	SiCl4 MFC set to  0.000000
3/22/2010	12:20:01 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	12:20:01 PM	Tube furnace set to 0
3/22/2010	12:20:23 PM	Helium valve closed
3/22/2010	12:20:23 PM	H2 valve closed
3/22/2010	12:20:23 PM	BCl3 valve closed
3/22/2010	12:20:23 PM	PH3 valve closed
3/22/2010	12:20:23 PM	SiCl4 pre valve closed
3/22/2010	12:20:23 PM	SiCl4 post valve closed
3/22/2010	12:20:23 PM	Bubbler valve closed
3/22/2010	12:20:23 PM	Main Vac valve opened
3/22/2010	12:20:23 PM	Bypass valve opened
3/22/2010	12:20:23 PM	Helium MFC set to  0.000000
3/22/2010	12:20:23 PM	H2 MFC set to  0.000000
3/22/2010	12:20:23 PM	BCl3 MFC set to  0.000000
3/22/2010	12:20:23 PM	SiCl4 MFC set to  0.000000
3/22/2010	12:20:23 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	12:20:23 PM	Tube furnace set to 0
3/22/2010	12:20:23 PM	Run finished at 12:20 PM
3/22/2010	12:20:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2010	12:20:49 PM	Helium MFC set to  100.000000
3/22/2010	12:20:52 PM	Helium valve opened
3/22/2010	12:22:44 PM	Helium valve closed
3/22/2010	1:22:19 PM	Recipe started at 1:22 PM
3/22/2010	1:22:19 PM	Helium valve closed
3/22/2010	1:22:19 PM	BCl3 valve closed
3/22/2010	1:22:19 PM	PH3 valve closed
3/22/2010	1:22:19 PM	SiCl4 pre valve closed
3/22/2010	1:22:19 PM	SiCl4 post valve closed
3/22/2010	1:22:19 PM	Main Vac valve closed
3/22/2010	1:22:19 PM	Bypass valve closed
3/22/2010	1:22:19 PM	Bubbler valve closed
3/22/2010	1:22:19 PM	H2 valve opened
3/22/2010	1:22:19 PM	Helium MFC set to  0.000000
3/22/2010	1:22:19 PM	H2 MFC set to  500.000000
3/22/2010	1:22:19 PM	BCl3 MFC set to  0.000000
3/22/2010	1:22:19 PM	SiCl4 MFC set to  0.000000
3/22/2010	1:22:19 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	1:22:19 PM	Tube furnace set to 0
3/22/2010	1:23:42 PM	Helium valve closed
3/22/2010	1:23:42 PM	BCl3 valve closed
3/22/2010	1:23:42 PM	PH3 valve closed
3/22/2010	1:23:42 PM	SiCl4 pre valve closed
3/22/2010	1:23:42 PM	SiCl4 post valve closed
3/22/2010	1:23:42 PM	Main Vac valve closed
3/22/2010	1:23:42 PM	Bypass valve closed
3/22/2010	1:23:42 PM	H2 valve opened
3/22/2010	1:23:42 PM	Bubbler valve opened
3/22/2010	1:23:42 PM	Helium MFC set to  0.000000
3/22/2010	1:23:42 PM	H2 MFC set to  500.000000
3/22/2010	1:23:42 PM	BCl3 MFC set to  0.000000
3/22/2010	1:23:42 PM	SiCl4 MFC set to  0.000000
3/22/2010	1:23:42 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	1:23:42 PM	Tube furnace set to 0
3/22/2010	1:43:42 PM	Helium valve closed
3/22/2010	1:43:42 PM	PH3 valve closed
3/22/2010	1:43:42 PM	Main Vac valve closed
3/22/2010	1:43:42 PM	Bypass valve closed
3/22/2010	1:43:42 PM	H2 valve opened
3/22/2010	1:43:42 PM	BCl3 valve opened
3/22/2010	1:43:42 PM	SiCl4 pre valve opened
3/22/2010	1:43:42 PM	SiCl4 post valve opened
3/22/2010	1:43:42 PM	Bubbler valve opened
3/22/2010	1:43:42 PM	Helium MFC set to  0.000000
3/22/2010	1:43:42 PM	H2 MFC set to  500.000000
3/22/2010	1:43:42 PM	BCl3 MFC set to  35.000000
3/22/2010	1:43:42 PM	SiCl4 MFC set to  400.000000
3/22/2010	1:43:42 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	1:43:42 PM	Tube furnace set to 0
3/22/2010	2:03:43 PM	H2 valve closed
3/22/2010	2:03:43 PM	BCl3 valve closed
3/22/2010	2:03:43 PM	PH3 valve closed
3/22/2010	2:03:43 PM	SiCl4 pre valve closed
3/22/2010	2:03:43 PM	SiCl4 post valve closed
3/22/2010	2:03:43 PM	Main Vac valve closed
3/22/2010	2:03:43 PM	Bypass valve closed
3/22/2010	2:03:43 PM	Helium valve opened
3/22/2010	2:03:43 PM	Bubbler valve opened
3/22/2010	2:03:43 PM	Helium MFC set to  500.000000
3/22/2010	2:03:43 PM	H2 MFC set to  0.000000
3/22/2010	2:03:43 PM	BCl3 MFC set to  0.000000
3/22/2010	2:03:43 PM	SiCl4 MFC set to  0.000000
3/22/2010	2:03:43 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	2:03:43 PM	Tube furnace set to 0
3/22/2010	2:23:43 PM	Helium valve closed
3/22/2010	2:23:43 PM	H2 valve closed
3/22/2010	2:23:43 PM	BCl3 valve closed
3/22/2010	2:23:43 PM	PH3 valve closed
3/22/2010	2:23:43 PM	SiCl4 pre valve closed
3/22/2010	2:23:43 PM	SiCl4 post valve closed
3/22/2010	2:23:43 PM	Main Vac valve closed
3/22/2010	2:23:43 PM	Bypass valve closed
3/22/2010	2:23:43 PM	Bubbler valve closed
3/22/2010	2:23:43 PM	Helium MFC set to  0.000000
3/22/2010	2:23:43 PM	H2 MFC set to  0.000000
3/22/2010	2:23:43 PM	BCl3 MFC set to  0.000000
3/22/2010	2:23:43 PM	SiCl4 MFC set to  0.000000
3/22/2010	2:23:43 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	2:23:43 PM	Tube furnace set to 0
3/22/2010	2:23:43 PM	Run finished at 2:23 PM
3/22/2010	2:23:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/22/2010	2:23:56 PM	Recipe started at 2:23 PM
3/22/2010	2:23:56 PM	H2 valve closed
3/22/2010	2:23:56 PM	BCl3 valve closed
3/22/2010	2:23:56 PM	PH3 valve closed
3/22/2010	2:23:56 PM	SiCl4 pre valve closed
3/22/2010	2:23:56 PM	SiCl4 post valve closed
3/22/2010	2:23:56 PM	Main Vac valve closed
3/22/2010	2:23:56 PM	Bypass valve closed
3/22/2010	2:23:56 PM	Bubbler valve closed
3/22/2010	2:23:56 PM	Helium valve opened
3/22/2010	2:23:56 PM	Helium MFC set to  500.000000
3/22/2010	2:23:56 PM	H2 MFC set to  0.000000
3/22/2010	2:23:56 PM	BCl3 MFC set to  0.000000
3/22/2010	2:23:56 PM	SiCl4 MFC set to  0.000000
3/22/2010	2:23:56 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	2:23:56 PM	Tube furnace set to 0
3/22/2010	2:23:56 PM	Helium valve closed
3/22/2010	2:23:56 PM	H2 valve closed
3/22/2010	2:23:56 PM	BCl3 valve closed
3/22/2010	2:23:56 PM	PH3 valve closed
3/22/2010	2:23:56 PM	SiCl4 pre valve closed
3/22/2010	2:23:56 PM	SiCl4 post valve closed
3/22/2010	2:23:56 PM	Main Vac valve closed
3/22/2010	2:23:56 PM	Bypass valve closed
3/22/2010	2:23:56 PM	Bubbler valve closed
3/22/2010	2:23:56 PM	Helium MFC set to  0.000000
3/22/2010	2:23:56 PM	H2 MFC set to  0.000000
3/22/2010	2:23:56 PM	BCl3 MFC set to  0.000000
3/22/2010	2:23:56 PM	SiCl4 MFC set to  0.000000
3/22/2010	2:23:56 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	2:23:56 PM	Tube furnace set to 0
3/22/2010	2:23:57 PM	Run finished at 2:23 PM
3/22/2010	2:23:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/22/2010	2:30:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2010	2:30:03 PM	Recipe started at 2:30 PM
3/22/2010	2:30:03 PM	Helium valve closed
3/22/2010	2:30:03 PM	H2 valve closed
3/22/2010	2:30:03 PM	BCl3 valve closed
3/22/2010	2:30:03 PM	PH3 valve closed
3/22/2010	2:30:03 PM	SiCl4 pre valve closed
3/22/2010	2:30:03 PM	SiCl4 post valve closed
3/22/2010	2:30:03 PM	Main Vac valve closed
3/22/2010	2:30:03 PM	Bubbler valve closed
3/22/2010	2:30:03 PM	Bypass valve opened
3/22/2010	2:30:03 PM	Helium MFC set to  0.000000
3/22/2010	2:30:03 PM	H2 MFC set to  0.000000
3/22/2010	2:30:03 PM	BCl3 MFC set to  0.000000
3/22/2010	2:30:03 PM	SiCl4 MFC set to  0.000000
3/22/2010	2:30:03 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	2:30:03 PM	Tube furnace set to 0
3/22/2010	2:30:34 PM	Helium valve closed
3/22/2010	2:30:34 PM	H2 valve closed
3/22/2010	2:30:34 PM	BCl3 valve closed
3/22/2010	2:30:34 PM	PH3 valve closed
3/22/2010	2:30:34 PM	SiCl4 pre valve closed
3/22/2010	2:30:34 PM	SiCl4 post valve closed
3/22/2010	2:30:34 PM	Bubbler valve closed
3/22/2010	2:30:34 PM	Main Vac valve opened
3/22/2010	2:30:34 PM	Bypass valve opened
3/22/2010	2:30:34 PM	Helium MFC set to  0.000000
3/22/2010	2:30:34 PM	H2 MFC set to  0.000000
3/22/2010	2:30:34 PM	BCl3 MFC set to  0.000000
3/22/2010	2:30:34 PM	SiCl4 MFC set to  0.000000
3/22/2010	2:30:34 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	2:30:34 PM	Tube furnace set to 0
3/22/2010	2:30:35 PM	Run finished at 2:30 PM
3/22/2010	2:30:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2010	2:31:39 PM	Helium MFC set to  100.000000
3/22/2010	2:31:42 PM	Helium valve opened
3/22/2010	2:38:04 PM	Helium valve closed
3/22/2010	2:38:08 PM	Helium MFC set to  0.000000
3/22/2010	2:48:58 PM	Recipe started at 2:48 PM
3/22/2010	2:48:58 PM	Helium valve closed
3/22/2010	2:48:58 PM	BCl3 valve closed
3/22/2010	2:48:58 PM	PH3 valve closed
3/22/2010	2:48:58 PM	SiCl4 pre valve closed
3/22/2010	2:48:58 PM	SiCl4 post valve closed
3/22/2010	2:48:58 PM	Main Vac valve closed
3/22/2010	2:48:58 PM	Bypass valve closed
3/22/2010	2:48:58 PM	Bubbler valve closed
3/22/2010	2:48:58 PM	H2 valve opened
3/22/2010	2:48:58 PM	Helium MFC set to  0.000000
3/22/2010	2:48:58 PM	H2 MFC set to  500.000000
3/22/2010	2:48:58 PM	BCl3 MFC set to  0.000000
3/22/2010	2:48:58 PM	SiCl4 MFC set to  0.000000
3/22/2010	2:48:58 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	2:48:58 PM	Tube furnace set to 0
3/22/2010	2:50:19 PM	Helium valve closed
3/22/2010	2:50:19 PM	BCl3 valve closed
3/22/2010	2:50:19 PM	PH3 valve closed
3/22/2010	2:50:19 PM	SiCl4 pre valve closed
3/22/2010	2:50:19 PM	SiCl4 post valve closed
3/22/2010	2:50:19 PM	Main Vac valve closed
3/22/2010	2:50:19 PM	Bypass valve closed
3/22/2010	2:50:19 PM	H2 valve opened
3/22/2010	2:50:19 PM	Bubbler valve opened
3/22/2010	2:50:19 PM	Helium MFC set to  0.000000
3/22/2010	2:50:19 PM	H2 MFC set to  500.000000
3/22/2010	2:50:19 PM	BCl3 MFC set to  0.000000
3/22/2010	2:50:19 PM	SiCl4 MFC set to  0.000000
3/22/2010	2:50:19 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	2:50:19 PM	Tube furnace set to 0
3/22/2010	3:10:20 PM	Helium valve closed
3/22/2010	3:10:20 PM	PH3 valve closed
3/22/2010	3:10:20 PM	Main Vac valve closed
3/22/2010	3:10:20 PM	Bypass valve closed
3/22/2010	3:10:20 PM	H2 valve opened
3/22/2010	3:10:20 PM	BCl3 valve opened
3/22/2010	3:10:20 PM	SiCl4 pre valve opened
3/22/2010	3:10:20 PM	SiCl4 post valve opened
3/22/2010	3:10:20 PM	Bubbler valve opened
3/22/2010	3:10:20 PM	Helium MFC set to  0.000000
3/22/2010	3:10:20 PM	H2 MFC set to  500.000000
3/22/2010	3:10:20 PM	BCl3 MFC set to  35.000000
3/22/2010	3:10:20 PM	SiCl4 MFC set to  400.000000
3/22/2010	3:10:20 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	3:10:20 PM	Tube furnace set to 0
3/22/2010	3:30:20 PM	H2 valve closed
3/22/2010	3:30:20 PM	BCl3 valve closed
3/22/2010	3:30:20 PM	PH3 valve closed
3/22/2010	3:30:20 PM	SiCl4 pre valve closed
3/22/2010	3:30:20 PM	SiCl4 post valve closed
3/22/2010	3:30:20 PM	Main Vac valve closed
3/22/2010	3:30:20 PM	Bypass valve closed
3/22/2010	3:30:20 PM	Helium valve opened
3/22/2010	3:30:20 PM	Bubbler valve opened
3/22/2010	3:30:20 PM	Helium MFC set to  500.000000
3/22/2010	3:30:20 PM	H2 MFC set to  0.000000
3/22/2010	3:30:20 PM	BCl3 MFC set to  0.000000
3/22/2010	3:30:20 PM	SiCl4 MFC set to  0.000000
3/22/2010	3:30:20 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	3:30:20 PM	Tube furnace set to 0
3/22/2010	3:50:20 PM	Helium valve closed
3/22/2010	3:50:20 PM	H2 valve closed
3/22/2010	3:50:20 PM	BCl3 valve closed
3/22/2010	3:50:20 PM	PH3 valve closed
3/22/2010	3:50:20 PM	SiCl4 pre valve closed
3/22/2010	3:50:20 PM	SiCl4 post valve closed
3/22/2010	3:50:20 PM	Main Vac valve closed
3/22/2010	3:50:20 PM	Bypass valve closed
3/22/2010	3:50:20 PM	Bubbler valve closed
3/22/2010	3:50:20 PM	Helium MFC set to  0.000000
3/22/2010	3:50:20 PM	H2 MFC set to  0.000000
3/22/2010	3:50:20 PM	BCl3 MFC set to  0.000000
3/22/2010	3:50:20 PM	SiCl4 MFC set to  0.000000
3/22/2010	3:50:20 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	3:50:20 PM	Tube furnace set to 0
3/22/2010	3:50:21 PM	Run finished at 3:50 PM
3/22/2010	3:58:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2010	3:58:24 PM	Recipe started at 3:58 PM
3/22/2010	3:58:24 PM	Helium valve closed
3/22/2010	3:58:24 PM	H2 valve closed
3/22/2010	3:58:24 PM	BCl3 valve closed
3/22/2010	3:58:24 PM	PH3 valve closed
3/22/2010	3:58:24 PM	SiCl4 pre valve closed
3/22/2010	3:58:24 PM	SiCl4 post valve closed
3/22/2010	3:58:24 PM	Main Vac valve closed
3/22/2010	3:58:24 PM	Bubbler valve closed
3/22/2010	3:58:24 PM	Bypass valve opened
3/22/2010	3:58:24 PM	Helium MFC set to  0.000000
3/22/2010	3:58:24 PM	H2 MFC set to  0.000000
3/22/2010	3:58:24 PM	BCl3 MFC set to  0.000000
3/22/2010	3:58:24 PM	SiCl4 MFC set to  0.000000
3/22/2010	3:58:24 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	3:58:24 PM	Tube furnace set to 0
3/22/2010	3:58:56 PM	Helium valve closed
3/22/2010	3:58:56 PM	H2 valve closed
3/22/2010	3:58:56 PM	BCl3 valve closed
3/22/2010	3:58:56 PM	PH3 valve closed
3/22/2010	3:58:56 PM	SiCl4 pre valve closed
3/22/2010	3:58:56 PM	SiCl4 post valve closed
3/22/2010	3:58:56 PM	Bubbler valve closed
3/22/2010	3:58:56 PM	Main Vac valve opened
3/22/2010	3:58:56 PM	Bypass valve opened
3/22/2010	3:58:56 PM	Helium MFC set to  0.000000
3/22/2010	3:58:56 PM	H2 MFC set to  0.000000
3/22/2010	3:58:56 PM	BCl3 MFC set to  0.000000
3/22/2010	3:58:56 PM	SiCl4 MFC set to  0.000000
3/22/2010	3:58:56 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	3:58:56 PM	Tube furnace set to 0
3/22/2010	3:58:56 PM	Run finished at 3:58 PM
3/22/2010	3:58:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2010	3:59:46 PM	Helium MFC set to  100.000000
3/22/2010	3:59:47 PM	Helium valve opened
3/22/2010	4:05:10 PM	Helium valve closed
3/22/2010	4:05:14 PM	Helium MFC set to  0.000000
3/22/2010	4:06:01 PM	Recipe started at 4:06 PM
3/22/2010	4:06:01 PM	Helium valve closed
3/22/2010	4:06:01 PM	BCl3 valve closed
3/22/2010	4:06:01 PM	PH3 valve closed
3/22/2010	4:06:01 PM	SiCl4 pre valve closed
3/22/2010	4:06:01 PM	SiCl4 post valve closed
3/22/2010	4:06:01 PM	Main Vac valve closed
3/22/2010	4:06:01 PM	Bypass valve closed
3/22/2010	4:06:01 PM	Bubbler valve closed
3/22/2010	4:06:01 PM	H2 valve opened
3/22/2010	4:06:01 PM	Helium MFC set to  0.000000
3/22/2010	4:06:01 PM	H2 MFC set to  500.000000
3/22/2010	4:06:01 PM	BCl3 MFC set to  0.000000
3/22/2010	4:06:01 PM	SiCl4 MFC set to  0.000000
3/22/2010	4:06:01 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	4:06:01 PM	Tube furnace set to 0
3/22/2010	4:07:20 PM	Helium valve closed
3/22/2010	4:07:20 PM	BCl3 valve closed
3/22/2010	4:07:20 PM	PH3 valve closed
3/22/2010	4:07:20 PM	SiCl4 pre valve closed
3/22/2010	4:07:20 PM	SiCl4 post valve closed
3/22/2010	4:07:20 PM	Main Vac valve closed
3/22/2010	4:07:20 PM	Bypass valve closed
3/22/2010	4:07:20 PM	H2 valve opened
3/22/2010	4:07:20 PM	Bubbler valve opened
3/22/2010	4:07:20 PM	Helium MFC set to  0.000000
3/22/2010	4:07:20 PM	H2 MFC set to  500.000000
3/22/2010	4:07:20 PM	BCl3 MFC set to  0.000000
3/22/2010	4:07:20 PM	SiCl4 MFC set to  0.000000
3/22/2010	4:07:20 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	4:07:20 PM	Tube furnace set to 0
3/22/2010	4:27:21 PM	Helium valve closed
3/22/2010	4:27:21 PM	PH3 valve closed
3/22/2010	4:27:21 PM	Main Vac valve closed
3/22/2010	4:27:21 PM	Bypass valve closed
3/22/2010	4:27:21 PM	H2 valve opened
3/22/2010	4:27:21 PM	BCl3 valve opened
3/22/2010	4:27:21 PM	SiCl4 pre valve opened
3/22/2010	4:27:21 PM	SiCl4 post valve opened
3/22/2010	4:27:21 PM	Bubbler valve opened
3/22/2010	4:27:21 PM	Helium MFC set to  0.000000
3/22/2010	4:27:21 PM	H2 MFC set to  500.000000
3/22/2010	4:27:21 PM	BCl3 MFC set to  35.000000
3/22/2010	4:27:21 PM	SiCl4 MFC set to  400.000000
3/22/2010	4:27:21 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	4:27:21 PM	Tube furnace set to 0
3/22/2010	4:47:21 PM	H2 valve closed
3/22/2010	4:47:21 PM	BCl3 valve closed
3/22/2010	4:47:21 PM	PH3 valve closed
3/22/2010	4:47:21 PM	SiCl4 pre valve closed
3/22/2010	4:47:21 PM	SiCl4 post valve closed
3/22/2010	4:47:21 PM	Main Vac valve closed
3/22/2010	4:47:21 PM	Bypass valve closed
3/22/2010	4:47:21 PM	Helium valve opened
3/22/2010	4:47:21 PM	Bubbler valve opened
3/22/2010	4:47:21 PM	Helium MFC set to  500.000000
3/22/2010	4:47:21 PM	H2 MFC set to  0.000000
3/22/2010	4:47:21 PM	BCl3 MFC set to  0.000000
3/22/2010	4:47:21 PM	SiCl4 MFC set to  0.000000
3/22/2010	4:47:21 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	4:47:21 PM	Tube furnace set to 0
3/22/2010	5:07:22 PM	Helium valve closed
3/22/2010	5:07:22 PM	H2 valve closed
3/22/2010	5:07:22 PM	BCl3 valve closed
3/22/2010	5:07:22 PM	PH3 valve closed
3/22/2010	5:07:22 PM	SiCl4 pre valve closed
3/22/2010	5:07:22 PM	SiCl4 post valve closed
3/22/2010	5:07:22 PM	Main Vac valve closed
3/22/2010	5:07:22 PM	Bypass valve closed
3/22/2010	5:07:22 PM	Bubbler valve closed
3/22/2010	5:07:22 PM	Helium MFC set to  0.000000
3/22/2010	5:07:22 PM	H2 MFC set to  0.000000
3/22/2010	5:07:22 PM	BCl3 MFC set to  0.000000
3/22/2010	5:07:22 PM	SiCl4 MFC set to  0.000000
3/22/2010	5:07:22 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	5:07:22 PM	Tube furnace set to 0
3/22/2010	5:07:22 PM	Run finished at 5:07 PM
3/22/2010	7:00:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2010	7:00:30 PM	Recipe started at 7:00 PM
3/22/2010	7:00:30 PM	Helium valve closed
3/22/2010	7:00:30 PM	H2 valve closed
3/22/2010	7:00:30 PM	BCl3 valve closed
3/22/2010	7:00:30 PM	PH3 valve closed
3/22/2010	7:00:30 PM	SiCl4 pre valve closed
3/22/2010	7:00:30 PM	SiCl4 post valve closed
3/22/2010	7:00:30 PM	Main Vac valve closed
3/22/2010	7:00:30 PM	Bubbler valve closed
3/22/2010	7:00:30 PM	Bypass valve opened
3/22/2010	7:00:30 PM	Helium MFC set to  0.000000
3/22/2010	7:00:30 PM	H2 MFC set to  0.000000
3/22/2010	7:00:30 PM	BCl3 MFC set to  0.000000
3/22/2010	7:00:30 PM	SiCl4 MFC set to  0.000000
3/22/2010	7:00:30 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	7:00:30 PM	Tube furnace set to 0
3/22/2010	7:01:02 PM	Helium valve closed
3/22/2010	7:01:02 PM	H2 valve closed
3/22/2010	7:01:02 PM	BCl3 valve closed
3/22/2010	7:01:02 PM	PH3 valve closed
3/22/2010	7:01:02 PM	SiCl4 pre valve closed
3/22/2010	7:01:02 PM	SiCl4 post valve closed
3/22/2010	7:01:02 PM	Bubbler valve closed
3/22/2010	7:01:02 PM	Main Vac valve opened
3/22/2010	7:01:02 PM	Bypass valve opened
3/22/2010	7:01:02 PM	Helium MFC set to  0.000000
3/22/2010	7:01:02 PM	H2 MFC set to  0.000000
3/22/2010	7:01:02 PM	BCl3 MFC set to  0.000000
3/22/2010	7:01:02 PM	SiCl4 MFC set to  0.000000
3/22/2010	7:01:02 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	7:01:02 PM	Tube furnace set to 0
3/22/2010	7:01:03 PM	Run finished at 7:01 PM
3/22/2010	7:01:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2010	7:02:55 PM	Main Vac valve closed
3/22/2010	7:02:56 PM	Bypass valve closed
3/22/2010	7:03:03 PM	Main Vac valve opened
3/22/2010	7:03:04 PM	Bypass valve opened
3/22/2010	7:03:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/22/2010	7:03:27 PM	Recipe started at 7:03 PM
3/22/2010	7:03:27 PM	H2 valve closed
3/22/2010	7:03:27 PM	BCl3 valve closed
3/22/2010	7:03:27 PM	PH3 valve closed
3/22/2010	7:03:27 PM	SiCl4 pre valve closed
3/22/2010	7:03:27 PM	SiCl4 post valve closed
3/22/2010	7:03:27 PM	Main Vac valve closed
3/22/2010	7:03:27 PM	Bypass valve closed
3/22/2010	7:03:27 PM	Bubbler valve closed
3/22/2010	7:03:27 PM	Helium valve opened
3/22/2010	7:03:27 PM	Helium MFC set to  500.000000
3/22/2010	7:03:27 PM	H2 MFC set to  0.000000
3/22/2010	7:03:27 PM	BCl3 MFC set to  0.000000
3/22/2010	7:03:27 PM	SiCl4 MFC set to  0.000000
3/22/2010	7:03:27 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	7:03:27 PM	Tube furnace set to 0
3/22/2010	7:04:50 PM	Helium valve closed
3/22/2010	7:04:50 PM	H2 valve closed
3/22/2010	7:04:50 PM	BCl3 valve closed
3/22/2010	7:04:50 PM	PH3 valve closed
3/22/2010	7:04:50 PM	SiCl4 pre valve closed
3/22/2010	7:04:50 PM	SiCl4 post valve closed
3/22/2010	7:04:50 PM	Main Vac valve closed
3/22/2010	7:04:50 PM	Bypass valve closed
3/22/2010	7:04:50 PM	Bubbler valve closed
3/22/2010	7:04:50 PM	Helium MFC set to  0.000000
3/22/2010	7:04:50 PM	H2 MFC set to  0.000000
3/22/2010	7:04:50 PM	BCl3 MFC set to  0.000000
3/22/2010	7:04:50 PM	SiCl4 MFC set to  0.000000
3/22/2010	7:04:50 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	7:04:50 PM	Tube furnace set to 0
3/22/2010	7:05:05 PM	Helium valve closed
3/22/2010	7:05:05 PM	H2 valve closed
3/22/2010	7:05:05 PM	BCl3 valve closed
3/22/2010	7:05:05 PM	PH3 valve closed
3/22/2010	7:05:05 PM	SiCl4 pre valve closed
3/22/2010	7:05:05 PM	SiCl4 post valve closed
3/22/2010	7:05:05 PM	Main Vac valve closed
3/22/2010	7:05:05 PM	Bubbler valve closed
3/22/2010	7:05:05 PM	Bypass valve opened
3/22/2010	7:05:05 PM	Helium MFC set to  0.000000
3/22/2010	7:05:05 PM	H2 MFC set to  0.000000
3/22/2010	7:05:05 PM	BCl3 MFC set to  0.000000
3/22/2010	7:05:05 PM	SiCl4 MFC set to  0.000000
3/22/2010	7:05:05 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	7:05:05 PM	Tube furnace set to 0
3/22/2010	7:05:27 PM	Helium valve closed
3/22/2010	7:05:27 PM	H2 valve closed
3/22/2010	7:05:27 PM	BCl3 valve closed
3/22/2010	7:05:27 PM	PH3 valve closed
3/22/2010	7:05:27 PM	SiCl4 pre valve closed
3/22/2010	7:05:27 PM	SiCl4 post valve closed
3/22/2010	7:05:27 PM	Bubbler valve closed
3/22/2010	7:05:27 PM	Main Vac valve opened
3/22/2010	7:05:27 PM	Bypass valve opened
3/22/2010	7:05:27 PM	Helium MFC set to  0.000000
3/22/2010	7:05:27 PM	H2 MFC set to  0.000000
3/22/2010	7:05:27 PM	BCl3 MFC set to  0.000000
3/22/2010	7:05:27 PM	SiCl4 MFC set to  0.000000
3/22/2010	7:05:27 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	7:05:27 PM	Tube furnace set to 0
3/22/2010	7:10:28 PM	H2 valve closed
3/22/2010	7:10:28 PM	BCl3 valve closed
3/22/2010	7:10:28 PM	PH3 valve closed
3/22/2010	7:10:28 PM	SiCl4 pre valve closed
3/22/2010	7:10:28 PM	SiCl4 post valve closed
3/22/2010	7:10:28 PM	Main Vac valve closed
3/22/2010	7:10:28 PM	Bypass valve closed
3/22/2010	7:10:28 PM	Bubbler valve closed
3/22/2010	7:10:28 PM	Helium valve opened
3/22/2010	7:10:28 PM	Helium MFC set to  500.000000
3/22/2010	7:10:28 PM	H2 MFC set to  0.000000
3/22/2010	7:10:28 PM	BCl3 MFC set to  0.000000
3/22/2010	7:10:28 PM	SiCl4 MFC set to  0.000000
3/22/2010	7:10:28 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	7:10:28 PM	Tube furnace set to 0
3/22/2010	7:11:50 PM	Helium valve closed
3/22/2010	7:11:50 PM	H2 valve closed
3/22/2010	7:11:50 PM	BCl3 valve closed
3/22/2010	7:11:50 PM	PH3 valve closed
3/22/2010	7:11:50 PM	SiCl4 pre valve closed
3/22/2010	7:11:50 PM	SiCl4 post valve closed
3/22/2010	7:11:50 PM	Main Vac valve closed
3/22/2010	7:11:50 PM	Bypass valve closed
3/22/2010	7:11:50 PM	Bubbler valve closed
3/22/2010	7:11:50 PM	Helium MFC set to  0.000000
3/22/2010	7:11:50 PM	H2 MFC set to  0.000000
3/22/2010	7:11:50 PM	BCl3 MFC set to  0.000000
3/22/2010	7:11:50 PM	SiCl4 MFC set to  0.000000
3/22/2010	7:11:50 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	7:11:50 PM	Tube furnace set to 0
3/22/2010	7:12:05 PM	Helium valve closed
3/22/2010	7:12:06 PM	H2 valve closed
3/22/2010	7:12:06 PM	BCl3 valve closed
3/22/2010	7:12:06 PM	PH3 valve closed
3/22/2010	7:12:06 PM	SiCl4 pre valve closed
3/22/2010	7:12:06 PM	SiCl4 post valve closed
3/22/2010	7:12:06 PM	Main Vac valve closed
3/22/2010	7:12:06 PM	Bubbler valve closed
3/22/2010	7:12:06 PM	Bypass valve opened
3/22/2010	7:12:06 PM	Helium MFC set to  0.000000
3/22/2010	7:12:06 PM	H2 MFC set to  0.000000
3/22/2010	7:12:06 PM	BCl3 MFC set to  0.000000
3/22/2010	7:12:06 PM	SiCl4 MFC set to  0.000000
3/22/2010	7:12:06 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	7:12:06 PM	Tube furnace set to 0
3/22/2010	7:12:28 PM	Helium valve closed
3/22/2010	7:12:28 PM	H2 valve closed
3/22/2010	7:12:28 PM	BCl3 valve closed
3/22/2010	7:12:28 PM	PH3 valve closed
3/22/2010	7:12:28 PM	SiCl4 pre valve closed
3/22/2010	7:12:28 PM	SiCl4 post valve closed
3/22/2010	7:12:28 PM	Bubbler valve closed
3/22/2010	7:12:28 PM	Main Vac valve opened
3/22/2010	7:12:28 PM	Bypass valve opened
3/22/2010	7:12:28 PM	Helium MFC set to  0.000000
3/22/2010	7:12:28 PM	H2 MFC set to  0.000000
3/22/2010	7:12:28 PM	BCl3 MFC set to  0.000000
3/22/2010	7:12:28 PM	SiCl4 MFC set to  0.000000
3/22/2010	7:12:28 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	7:12:28 PM	Tube furnace set to 0
3/22/2010	7:17:28 PM	H2 valve closed
3/22/2010	7:17:28 PM	BCl3 valve closed
3/22/2010	7:17:28 PM	PH3 valve closed
3/22/2010	7:17:28 PM	SiCl4 pre valve closed
3/22/2010	7:17:28 PM	SiCl4 post valve closed
3/22/2010	7:17:28 PM	Main Vac valve closed
3/22/2010	7:17:28 PM	Bypass valve closed
3/22/2010	7:17:28 PM	Bubbler valve closed
3/22/2010	7:17:28 PM	Helium valve opened
3/22/2010	7:17:28 PM	Helium MFC set to  500.000000
3/22/2010	7:17:28 PM	H2 MFC set to  0.000000
3/22/2010	7:17:28 PM	BCl3 MFC set to  0.000000
3/22/2010	7:17:28 PM	SiCl4 MFC set to  0.000000
3/22/2010	7:17:28 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	7:17:28 PM	Tube furnace set to 0
3/22/2010	7:18:51 PM	Helium valve closed
3/22/2010	7:18:51 PM	H2 valve closed
3/22/2010	7:18:51 PM	BCl3 valve closed
3/22/2010	7:18:51 PM	PH3 valve closed
3/22/2010	7:18:51 PM	SiCl4 pre valve closed
3/22/2010	7:18:51 PM	SiCl4 post valve closed
3/22/2010	7:18:51 PM	Main Vac valve closed
3/22/2010	7:18:51 PM	Bypass valve closed
3/22/2010	7:18:51 PM	Bubbler valve closed
3/22/2010	7:18:51 PM	Helium MFC set to  0.000000
3/22/2010	7:18:51 PM	H2 MFC set to  0.000000
3/22/2010	7:18:51 PM	BCl3 MFC set to  0.000000
3/22/2010	7:18:51 PM	SiCl4 MFC set to  0.000000
3/22/2010	7:18:51 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	7:18:51 PM	Tube furnace set to 0
3/22/2010	7:19:06 PM	Helium valve closed
3/22/2010	7:19:06 PM	H2 valve closed
3/22/2010	7:19:06 PM	BCl3 valve closed
3/22/2010	7:19:06 PM	PH3 valve closed
3/22/2010	7:19:06 PM	SiCl4 pre valve closed
3/22/2010	7:19:06 PM	SiCl4 post valve closed
3/22/2010	7:19:06 PM	Main Vac valve closed
3/22/2010	7:19:06 PM	Bubbler valve closed
3/22/2010	7:19:06 PM	Bypass valve opened
3/22/2010	7:19:06 PM	Helium MFC set to  0.000000
3/22/2010	7:19:06 PM	H2 MFC set to  0.000000
3/22/2010	7:19:06 PM	BCl3 MFC set to  0.000000
3/22/2010	7:19:06 PM	SiCl4 MFC set to  0.000000
3/22/2010	7:19:06 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	7:19:06 PM	Tube furnace set to 0
3/22/2010	7:19:29 PM	Helium valve closed
3/22/2010	7:19:29 PM	H2 valve closed
3/22/2010	7:19:29 PM	BCl3 valve closed
3/22/2010	7:19:29 PM	PH3 valve closed
3/22/2010	7:19:29 PM	SiCl4 pre valve closed
3/22/2010	7:19:29 PM	SiCl4 post valve closed
3/22/2010	7:19:29 PM	Bubbler valve closed
3/22/2010	7:19:29 PM	Main Vac valve opened
3/22/2010	7:19:29 PM	Bypass valve opened
3/22/2010	7:19:29 PM	Helium MFC set to  0.000000
3/22/2010	7:19:29 PM	H2 MFC set to  0.000000
3/22/2010	7:19:29 PM	BCl3 MFC set to  0.000000
3/22/2010	7:19:29 PM	SiCl4 MFC set to  0.000000
3/22/2010	7:19:29 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	7:19:29 PM	Tube furnace set to 0
3/22/2010	7:24:29 PM	Helium valve closed
3/22/2010	7:24:29 PM	H2 valve closed
3/22/2010	7:24:29 PM	BCl3 valve closed
3/22/2010	7:24:29 PM	PH3 valve closed
3/22/2010	7:24:29 PM	SiCl4 pre valve closed
3/22/2010	7:24:29 PM	SiCl4 post valve closed
3/22/2010	7:24:29 PM	Bubbler valve closed
3/22/2010	7:24:29 PM	Main Vac valve opened
3/22/2010	7:24:29 PM	Bypass valve opened
3/22/2010	7:24:29 PM	Helium MFC set to  0.000000
3/22/2010	7:24:29 PM	H2 MFC set to  0.000000
3/22/2010	7:24:29 PM	BCl3 MFC set to  0.000000
3/22/2010	7:24:29 PM	SiCl4 MFC set to  0.000000
3/22/2010	7:24:29 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	7:24:29 PM	Tube furnace set to 0
3/22/2010	7:24:30 PM	Run finished at 7:24 PM
3/22/2010	7:24:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/22/2010	7:41:00 PM	Main Vac valve closed
3/22/2010	7:41:02 PM	Bypass valve closed
3/22/2010	7:41:30 PM	Main Vac valve opened
3/22/2010	7:41:31 PM	Bypass valve opened
3/22/2010	7:43:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/22/2010	7:43:09 PM	Recipe started at 7:43 PM
3/22/2010	7:43:09 PM	H2 valve closed
3/22/2010	7:43:09 PM	BCl3 valve closed
3/22/2010	7:43:09 PM	PH3 valve closed
3/22/2010	7:43:09 PM	SiCl4 pre valve closed
3/22/2010	7:43:09 PM	SiCl4 post valve closed
3/22/2010	7:43:09 PM	Main Vac valve closed
3/22/2010	7:43:09 PM	Bypass valve closed
3/22/2010	7:43:09 PM	Bubbler valve closed
3/22/2010	7:43:09 PM	Helium valve opened
3/22/2010	7:43:09 PM	Helium MFC set to  500.000000
3/22/2010	7:43:09 PM	H2 MFC set to  0.000000
3/22/2010	7:43:09 PM	BCl3 MFC set to  0.000000
3/22/2010	7:43:09 PM	SiCl4 MFC set to  0.000000
3/22/2010	7:43:09 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	7:43:09 PM	Tube furnace set to 0
3/22/2010	7:43:24 PM	Run aborted at 7:43 PM
3/22/2010	7:43:24 PM	Helium valve closed
3/22/2010	7:43:24 PM	H2 valve closed
3/22/2010	7:43:24 PM	BCl3 valve closed
3/22/2010	7:43:24 PM	PH3 valve closed
3/22/2010	7:43:24 PM	SiCl4 pre valve closed
3/22/2010	7:43:24 PM	SiCl4 post valve closed
3/22/2010	7:43:24 PM	Bypass valve closed
3/22/2010	7:43:24 PM	Main Vac valve closed
3/22/2010	7:43:24 PM	Bubbler valve closed
3/22/2010	7:43:24 PM	Helium MFC set to  0.000000
3/22/2010	7:43:24 PM	H2 MFC set to  0.000000
3/22/2010	7:43:24 PM	BCl3 MFC set to  0.000000
3/22/2010	7:43:24 PM	SiCl4 MFC set to  0.000000
3/22/2010	7:43:24 PM	Tube furnace set to 0
3/22/2010	7:43:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/22/2010	7:43:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2010	7:43:25 PM	Recipe started at 7:43 PM
3/22/2010	7:43:25 PM	Helium valve closed
3/22/2010	7:43:25 PM	H2 valve closed
3/22/2010	7:43:25 PM	BCl3 valve closed
3/22/2010	7:43:25 PM	PH3 valve closed
3/22/2010	7:43:25 PM	SiCl4 pre valve closed
3/22/2010	7:43:25 PM	SiCl4 post valve closed
3/22/2010	7:43:25 PM	Main Vac valve closed
3/22/2010	7:43:25 PM	Bubbler valve closed
3/22/2010	7:43:25 PM	Bypass valve opened
3/22/2010	7:43:25 PM	Helium MFC set to  0.000000
3/22/2010	7:43:25 PM	H2 MFC set to  0.000000
3/22/2010	7:43:25 PM	BCl3 MFC set to  0.000000
3/22/2010	7:43:25 PM	SiCl4 MFC set to  0.000000
3/22/2010	7:43:25 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	7:43:25 PM	Tube furnace set to 0
3/22/2010	7:43:37 PM	Helium valve closed
3/22/2010	7:43:37 PM	H2 valve closed
3/22/2010	7:43:37 PM	BCl3 valve closed
3/22/2010	7:43:37 PM	PH3 valve closed
3/22/2010	7:43:37 PM	SiCl4 pre valve closed
3/22/2010	7:43:37 PM	SiCl4 post valve closed
3/22/2010	7:43:37 PM	Bubbler valve closed
3/22/2010	7:43:37 PM	Main Vac valve opened
3/22/2010	7:43:37 PM	Bypass valve opened
3/22/2010	7:43:37 PM	Helium MFC set to  0.000000
3/22/2010	7:43:37 PM	H2 MFC set to  0.000000
3/22/2010	7:43:37 PM	BCl3 MFC set to  0.000000
3/22/2010	7:43:37 PM	SiCl4 MFC set to  0.000000
3/22/2010	7:43:37 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	7:43:37 PM	Tube furnace set to 0
3/22/2010	7:43:37 PM	Run finished at 7:43 PM
3/22/2010	7:43:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2010	7:44:53 PM	Recipe started at 7:44 PM
3/22/2010	7:44:53 PM	Helium valve closed
3/22/2010	7:44:53 PM	BCl3 valve closed
3/22/2010	7:44:53 PM	PH3 valve closed
3/22/2010	7:44:53 PM	SiCl4 pre valve closed
3/22/2010	7:44:53 PM	SiCl4 post valve closed
3/22/2010	7:44:53 PM	Main Vac valve closed
3/22/2010	7:44:53 PM	Bypass valve closed
3/22/2010	7:44:53 PM	Bubbler valve closed
3/22/2010	7:44:53 PM	H2 valve opened
3/22/2010	7:44:53 PM	Helium MFC set to  0.000000
3/22/2010	7:44:53 PM	H2 MFC set to  500.000000
3/22/2010	7:44:53 PM	BCl3 MFC set to  0.000000
3/22/2010	7:44:53 PM	SiCl4 MFC set to  0.000000
3/22/2010	7:44:53 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	7:44:53 PM	Tube furnace set to 0
3/22/2010	7:46:13 PM	Helium valve closed
3/22/2010	7:46:13 PM	BCl3 valve closed
3/22/2010	7:46:13 PM	PH3 valve closed
3/22/2010	7:46:13 PM	SiCl4 pre valve closed
3/22/2010	7:46:13 PM	SiCl4 post valve closed
3/22/2010	7:46:13 PM	Main Vac valve closed
3/22/2010	7:46:13 PM	Bypass valve closed
3/22/2010	7:46:13 PM	H2 valve opened
3/22/2010	7:46:13 PM	Bubbler valve opened
3/22/2010	7:46:13 PM	Helium MFC set to  0.000000
3/22/2010	7:46:13 PM	H2 MFC set to  500.000000
3/22/2010	7:46:13 PM	BCl3 MFC set to  0.000000
3/22/2010	7:46:13 PM	SiCl4 MFC set to  0.000000
3/22/2010	7:46:13 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	7:46:13 PM	Tube furnace set to 0
3/22/2010	8:06:14 PM	Helium valve closed
3/22/2010	8:06:14 PM	BCl3 valve closed
3/22/2010	8:06:14 PM	PH3 valve closed
3/22/2010	8:06:14 PM	Main Vac valve closed
3/22/2010	8:06:14 PM	Bypass valve closed
3/22/2010	8:06:14 PM	H2 valve opened
3/22/2010	8:06:14 PM	SiCl4 pre valve opened
3/22/2010	8:06:14 PM	SiCl4 post valve opened
3/22/2010	8:06:14 PM	Bubbler valve opened
3/22/2010	8:06:14 PM	Helium MFC set to  0.000000
3/22/2010	8:06:14 PM	H2 MFC set to  500.000000
3/22/2010	8:06:14 PM	BCl3 MFC set to  0.000000
3/22/2010	8:06:14 PM	SiCl4 MFC set to  325.000000
3/22/2010	8:06:14 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	8:06:14 PM	Tube furnace set to 0
3/22/2010	8:26:14 PM	Helium valve closed
3/22/2010	8:26:14 PM	BCl3 valve closed
3/22/2010	8:26:14 PM	PH3 valve closed
3/22/2010	8:26:14 PM	SiCl4 pre valve closed
3/22/2010	8:26:14 PM	SiCl4 post valve closed
3/22/2010	8:26:14 PM	Main Vac valve closed
3/22/2010	8:26:14 PM	Bypass valve closed
3/22/2010	8:26:14 PM	H2 valve opened
3/22/2010	8:26:14 PM	Bubbler valve opened
3/22/2010	8:26:14 PM	Helium MFC set to  0.000000
3/22/2010	8:26:14 PM	H2 MFC set to  500.000000
3/22/2010	8:26:14 PM	BCl3 MFC set to  0.000000
3/22/2010	8:26:14 PM	SiCl4 MFC set to  0.000000
3/22/2010	8:26:14 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	8:26:14 PM	Tube furnace set to 0
3/22/2010	8:46:15 PM	H2 valve closed
3/22/2010	8:46:15 PM	BCl3 valve closed
3/22/2010	8:46:15 PM	PH3 valve closed
3/22/2010	8:46:15 PM	SiCl4 pre valve closed
3/22/2010	8:46:15 PM	SiCl4 post valve closed
3/22/2010	8:46:15 PM	Main Vac valve closed
3/22/2010	8:46:15 PM	Bypass valve closed
3/22/2010	8:46:15 PM	Helium valve opened
3/22/2010	8:46:15 PM	Bubbler valve opened
3/22/2010	8:46:15 PM	Helium MFC set to  500.000000
3/22/2010	8:46:15 PM	H2 MFC set to  0.000000
3/22/2010	8:46:15 PM	BCl3 MFC set to  0.000000
3/22/2010	8:46:15 PM	SiCl4 MFC set to  0.000000
3/22/2010	8:46:15 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	8:46:15 PM	Tube furnace set to 0
3/22/2010	8:56:56 PM	Run aborted at 8:56 PM
3/22/2010	8:56:56 PM	Helium valve closed
3/22/2010	8:56:56 PM	H2 valve closed
3/22/2010	8:56:56 PM	BCl3 valve closed
3/22/2010	8:56:56 PM	PH3 valve closed
3/22/2010	8:56:56 PM	SiCl4 pre valve closed
3/22/2010	8:56:56 PM	SiCl4 post valve closed
3/22/2010	8:56:56 PM	Bypass valve closed
3/22/2010	8:56:56 PM	Main Vac valve closed
3/22/2010	8:56:56 PM	Bubbler valve closed
3/22/2010	8:56:56 PM	Helium MFC set to  0.000000
3/22/2010	8:56:56 PM	H2 MFC set to  0.000000
3/22/2010	8:56:56 PM	BCl3 MFC set to  0.000000
3/22/2010	8:56:56 PM	SiCl4 MFC set to  0.000000
3/22/2010	8:56:56 PM	Tube furnace set to 0
3/22/2010	9:12:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2010	9:12:38 PM	Recipe started at 9:12 PM
3/22/2010	9:12:38 PM	Helium valve closed
3/22/2010	9:12:38 PM	H2 valve closed
3/22/2010	9:12:38 PM	BCl3 valve closed
3/22/2010	9:12:38 PM	PH3 valve closed
3/22/2010	9:12:38 PM	SiCl4 pre valve closed
3/22/2010	9:12:38 PM	SiCl4 post valve closed
3/22/2010	9:12:38 PM	Main Vac valve closed
3/22/2010	9:12:38 PM	Bubbler valve closed
3/22/2010	9:12:38 PM	Bypass valve opened
3/22/2010	9:12:38 PM	Helium MFC set to  0.000000
3/22/2010	9:12:38 PM	H2 MFC set to  0.000000
3/22/2010	9:12:38 PM	BCl3 MFC set to  0.000000
3/22/2010	9:12:38 PM	SiCl4 MFC set to  0.000000
3/22/2010	9:12:38 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	9:12:38 PM	Tube furnace set to 0
3/22/2010	9:13:10 PM	Helium valve closed
3/22/2010	9:13:10 PM	H2 valve closed
3/22/2010	9:13:10 PM	BCl3 valve closed
3/22/2010	9:13:10 PM	PH3 valve closed
3/22/2010	9:13:10 PM	SiCl4 pre valve closed
3/22/2010	9:13:10 PM	SiCl4 post valve closed
3/22/2010	9:13:10 PM	Bubbler valve closed
3/22/2010	9:13:10 PM	Main Vac valve opened
3/22/2010	9:13:10 PM	Bypass valve opened
3/22/2010	9:13:10 PM	Helium MFC set to  0.000000
3/22/2010	9:13:10 PM	H2 MFC set to  0.000000
3/22/2010	9:13:10 PM	BCl3 MFC set to  0.000000
3/22/2010	9:13:10 PM	SiCl4 MFC set to  0.000000
3/22/2010	9:13:10 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	9:13:10 PM	Tube furnace set to 0
3/22/2010	9:13:10 PM	Run finished at 9:13 PM
3/22/2010	9:13:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2010	9:14:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/22/2010	9:14:28 PM	Recipe started at 9:14 PM
3/22/2010	9:14:28 PM	H2 valve closed
3/22/2010	9:14:28 PM	BCl3 valve closed
3/22/2010	9:14:28 PM	PH3 valve closed
3/22/2010	9:14:28 PM	SiCl4 pre valve closed
3/22/2010	9:14:28 PM	SiCl4 post valve closed
3/22/2010	9:14:28 PM	Main Vac valve closed
3/22/2010	9:14:28 PM	Bypass valve closed
3/22/2010	9:14:28 PM	Bubbler valve closed
3/22/2010	9:14:28 PM	Helium valve opened
3/22/2010	9:14:28 PM	Helium MFC set to  500.000000
3/22/2010	9:14:28 PM	H2 MFC set to  0.000000
3/22/2010	9:14:28 PM	BCl3 MFC set to  0.000000
3/22/2010	9:14:28 PM	SiCl4 MFC set to  0.000000
3/22/2010	9:14:28 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	9:14:28 PM	Tube furnace set to 0
3/22/2010	9:15:49 PM	Helium valve closed
3/22/2010	9:15:49 PM	H2 valve closed
3/22/2010	9:15:49 PM	BCl3 valve closed
3/22/2010	9:15:49 PM	PH3 valve closed
3/22/2010	9:15:49 PM	SiCl4 pre valve closed
3/22/2010	9:15:49 PM	SiCl4 post valve closed
3/22/2010	9:15:49 PM	Main Vac valve closed
3/22/2010	9:15:49 PM	Bypass valve closed
3/22/2010	9:15:49 PM	Bubbler valve closed
3/22/2010	9:15:49 PM	Helium MFC set to  0.000000
3/22/2010	9:15:49 PM	H2 MFC set to  0.000000
3/22/2010	9:15:49 PM	BCl3 MFC set to  0.000000
3/22/2010	9:15:49 PM	SiCl4 MFC set to  0.000000
3/22/2010	9:15:49 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	9:15:49 PM	Tube furnace set to 0
3/22/2010	9:16:04 PM	Helium valve closed
3/22/2010	9:16:04 PM	H2 valve closed
3/22/2010	9:16:04 PM	BCl3 valve closed
3/22/2010	9:16:04 PM	PH3 valve closed
3/22/2010	9:16:04 PM	SiCl4 pre valve closed
3/22/2010	9:16:04 PM	SiCl4 post valve closed
3/22/2010	9:16:04 PM	Main Vac valve closed
3/22/2010	9:16:04 PM	Bubbler valve closed
3/22/2010	9:16:04 PM	Bypass valve opened
3/22/2010	9:16:04 PM	Helium MFC set to  0.000000
3/22/2010	9:16:04 PM	H2 MFC set to  0.000000
3/22/2010	9:16:04 PM	BCl3 MFC set to  0.000000
3/22/2010	9:16:04 PM	SiCl4 MFC set to  0.000000
3/22/2010	9:16:04 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	9:16:04 PM	Tube furnace set to 0
3/22/2010	9:16:26 PM	Helium valve closed
3/22/2010	9:16:26 PM	H2 valve closed
3/22/2010	9:16:26 PM	BCl3 valve closed
3/22/2010	9:16:26 PM	PH3 valve closed
3/22/2010	9:16:26 PM	SiCl4 pre valve closed
3/22/2010	9:16:26 PM	SiCl4 post valve closed
3/22/2010	9:16:26 PM	Bubbler valve closed
3/22/2010	9:16:26 PM	Main Vac valve opened
3/22/2010	9:16:26 PM	Bypass valve opened
3/22/2010	9:16:26 PM	Helium MFC set to  0.000000
3/22/2010	9:16:26 PM	H2 MFC set to  0.000000
3/22/2010	9:16:26 PM	BCl3 MFC set to  0.000000
3/22/2010	9:16:26 PM	SiCl4 MFC set to  0.000000
3/22/2010	9:16:26 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	9:16:26 PM	Tube furnace set to 0
3/22/2010	9:21:27 PM	H2 valve closed
3/22/2010	9:21:27 PM	BCl3 valve closed
3/22/2010	9:21:27 PM	PH3 valve closed
3/22/2010	9:21:27 PM	SiCl4 pre valve closed
3/22/2010	9:21:27 PM	SiCl4 post valve closed
3/22/2010	9:21:27 PM	Main Vac valve closed
3/22/2010	9:21:27 PM	Bypass valve closed
3/22/2010	9:21:27 PM	Bubbler valve closed
3/22/2010	9:21:27 PM	Helium valve opened
3/22/2010	9:21:27 PM	Helium MFC set to  500.000000
3/22/2010	9:21:27 PM	H2 MFC set to  0.000000
3/22/2010	9:21:27 PM	BCl3 MFC set to  0.000000
3/22/2010	9:21:27 PM	SiCl4 MFC set to  0.000000
3/22/2010	9:21:27 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	9:21:27 PM	Tube furnace set to 0
3/22/2010	9:22:48 PM	Helium valve closed
3/22/2010	9:22:48 PM	H2 valve closed
3/22/2010	9:22:48 PM	BCl3 valve closed
3/22/2010	9:22:48 PM	PH3 valve closed
3/22/2010	9:22:48 PM	SiCl4 pre valve closed
3/22/2010	9:22:48 PM	SiCl4 post valve closed
3/22/2010	9:22:48 PM	Main Vac valve closed
3/22/2010	9:22:48 PM	Bypass valve closed
3/22/2010	9:22:48 PM	Bubbler valve closed
3/22/2010	9:22:48 PM	Helium MFC set to  0.000000
3/22/2010	9:22:48 PM	H2 MFC set to  0.000000
3/22/2010	9:22:48 PM	BCl3 MFC set to  0.000000
3/22/2010	9:22:48 PM	SiCl4 MFC set to  0.000000
3/22/2010	9:22:48 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	9:22:48 PM	Tube furnace set to 0
3/22/2010	9:23:03 PM	Helium valve closed
3/22/2010	9:23:03 PM	H2 valve closed
3/22/2010	9:23:03 PM	BCl3 valve closed
3/22/2010	9:23:03 PM	PH3 valve closed
3/22/2010	9:23:03 PM	SiCl4 pre valve closed
3/22/2010	9:23:03 PM	SiCl4 post valve closed
3/22/2010	9:23:03 PM	Main Vac valve closed
3/22/2010	9:23:03 PM	Bubbler valve closed
3/22/2010	9:23:03 PM	Bypass valve opened
3/22/2010	9:23:03 PM	Helium MFC set to  0.000000
3/22/2010	9:23:03 PM	H2 MFC set to  0.000000
3/22/2010	9:23:03 PM	BCl3 MFC set to  0.000000
3/22/2010	9:23:03 PM	SiCl4 MFC set to  0.000000
3/22/2010	9:23:03 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	9:23:03 PM	Tube furnace set to 0
3/22/2010	9:23:25 PM	Helium valve closed
3/22/2010	9:23:25 PM	H2 valve closed
3/22/2010	9:23:25 PM	BCl3 valve closed
3/22/2010	9:23:25 PM	PH3 valve closed
3/22/2010	9:23:25 PM	SiCl4 pre valve closed
3/22/2010	9:23:25 PM	SiCl4 post valve closed
3/22/2010	9:23:25 PM	Bubbler valve closed
3/22/2010	9:23:25 PM	Main Vac valve opened
3/22/2010	9:23:25 PM	Bypass valve opened
3/22/2010	9:23:25 PM	Helium MFC set to  0.000000
3/22/2010	9:23:25 PM	H2 MFC set to  0.000000
3/22/2010	9:23:25 PM	BCl3 MFC set to  0.000000
3/22/2010	9:23:25 PM	SiCl4 MFC set to  0.000000
3/22/2010	9:23:25 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	9:23:25 PM	Tube furnace set to 0
3/22/2010	9:27:28 PM	Run aborted at 9:27 PM
3/22/2010	9:27:28 PM	Helium valve closed
3/22/2010	9:27:28 PM	H2 valve closed
3/22/2010	9:27:28 PM	BCl3 valve closed
3/22/2010	9:27:28 PM	PH3 valve closed
3/22/2010	9:27:28 PM	SiCl4 pre valve closed
3/22/2010	9:27:28 PM	SiCl4 post valve closed
3/22/2010	9:27:28 PM	Bypass valve closed
3/22/2010	9:27:28 PM	Main Vac valve closed
3/22/2010	9:27:28 PM	Bubbler valve closed
3/22/2010	9:27:28 PM	Helium MFC set to  0.000000
3/22/2010	9:27:28 PM	H2 MFC set to  0.000000
3/22/2010	9:27:28 PM	BCl3 MFC set to  0.000000
3/22/2010	9:27:28 PM	SiCl4 MFC set to  0.000000
3/22/2010	9:27:28 PM	Tube furnace set to 0
3/22/2010	9:27:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/22/2010	9:27:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/22/2010	9:27:31 PM	Recipe started at 9:27 PM
3/22/2010	9:27:31 PM	H2 valve closed
3/22/2010	9:27:31 PM	BCl3 valve closed
3/22/2010	9:27:31 PM	PH3 valve closed
3/22/2010	9:27:31 PM	SiCl4 pre valve closed
3/22/2010	9:27:31 PM	SiCl4 post valve closed
3/22/2010	9:27:31 PM	Main Vac valve closed
3/22/2010	9:27:31 PM	Bypass valve closed
3/22/2010	9:27:31 PM	Bubbler valve closed
3/22/2010	9:27:31 PM	Helium valve opened
3/22/2010	9:27:31 PM	Helium MFC set to  500.000000
3/22/2010	9:27:31 PM	H2 MFC set to  0.000000
3/22/2010	9:27:31 PM	BCl3 MFC set to  0.000000
3/22/2010	9:27:31 PM	SiCl4 MFC set to  0.000000
3/22/2010	9:27:31 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	9:27:31 PM	Tube furnace set to 0
3/22/2010	9:27:40 PM	Run aborted at 9:27 PM
3/22/2010	9:27:40 PM	Helium valve closed
3/22/2010	9:27:40 PM	H2 valve closed
3/22/2010	9:27:40 PM	BCl3 valve closed
3/22/2010	9:27:40 PM	PH3 valve closed
3/22/2010	9:27:40 PM	SiCl4 pre valve closed
3/22/2010	9:27:40 PM	SiCl4 post valve closed
3/22/2010	9:27:40 PM	Bypass valve closed
3/22/2010	9:27:40 PM	Main Vac valve closed
3/22/2010	9:27:40 PM	Bubbler valve closed
3/22/2010	9:27:40 PM	Helium MFC set to  0.000000
3/22/2010	9:27:40 PM	H2 MFC set to  0.000000
3/22/2010	9:27:40 PM	BCl3 MFC set to  0.000000
3/22/2010	9:27:40 PM	SiCl4 MFC set to  0.000000
3/22/2010	9:27:40 PM	Tube furnace set to 0
3/22/2010	9:27:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/22/2010	9:27:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/22/2010	9:27:47 PM	Recipe started at 9:27 PM
3/22/2010	9:27:47 PM	H2 valve closed
3/22/2010	9:27:47 PM	BCl3 valve closed
3/22/2010	9:27:47 PM	PH3 valve closed
3/22/2010	9:27:47 PM	SiCl4 pre valve closed
3/22/2010	9:27:47 PM	SiCl4 post valve closed
3/22/2010	9:27:47 PM	Main Vac valve closed
3/22/2010	9:27:47 PM	Bypass valve closed
3/22/2010	9:27:47 PM	Bubbler valve closed
3/22/2010	9:27:47 PM	Helium valve opened
3/22/2010	9:27:47 PM	Helium MFC set to  500.000000
3/22/2010	9:27:47 PM	H2 MFC set to  0.000000
3/22/2010	9:27:47 PM	BCl3 MFC set to  0.000000
3/22/2010	9:27:47 PM	SiCl4 MFC set to  0.000000
3/22/2010	9:27:47 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	9:27:47 PM	Tube furnace set to 0
3/22/2010	9:28:59 PM	Helium valve closed
3/22/2010	9:28:59 PM	H2 valve closed
3/22/2010	9:28:59 PM	BCl3 valve closed
3/22/2010	9:28:59 PM	PH3 valve closed
3/22/2010	9:28:59 PM	SiCl4 pre valve closed
3/22/2010	9:28:59 PM	SiCl4 post valve closed
3/22/2010	9:28:59 PM	Main Vac valve closed
3/22/2010	9:28:59 PM	Bypass valve closed
3/22/2010	9:28:59 PM	Bubbler valve closed
3/22/2010	9:28:59 PM	Helium MFC set to  0.000000
3/22/2010	9:28:59 PM	H2 MFC set to  0.000000
3/22/2010	9:28:59 PM	BCl3 MFC set to  0.000000
3/22/2010	9:28:59 PM	SiCl4 MFC set to  0.000000
3/22/2010	9:28:59 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	9:28:59 PM	Tube furnace set to 0
3/22/2010	9:29:14 PM	Helium valve closed
3/22/2010	9:29:14 PM	H2 valve closed
3/22/2010	9:29:14 PM	BCl3 valve closed
3/22/2010	9:29:14 PM	PH3 valve closed
3/22/2010	9:29:14 PM	SiCl4 pre valve closed
3/22/2010	9:29:14 PM	SiCl4 post valve closed
3/22/2010	9:29:14 PM	Main Vac valve closed
3/22/2010	9:29:14 PM	Bubbler valve closed
3/22/2010	9:29:14 PM	Bypass valve opened
3/22/2010	9:29:14 PM	Helium MFC set to  0.000000
3/22/2010	9:29:14 PM	H2 MFC set to  0.000000
3/22/2010	9:29:14 PM	BCl3 MFC set to  0.000000
3/22/2010	9:29:14 PM	SiCl4 MFC set to  0.000000
3/22/2010	9:29:14 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	9:29:14 PM	Tube furnace set to 0
3/22/2010	9:29:36 PM	Helium valve closed
3/22/2010	9:29:36 PM	H2 valve closed
3/22/2010	9:29:36 PM	BCl3 valve closed
3/22/2010	9:29:36 PM	PH3 valve closed
3/22/2010	9:29:36 PM	SiCl4 pre valve closed
3/22/2010	9:29:36 PM	SiCl4 post valve closed
3/22/2010	9:29:36 PM	Bubbler valve closed
3/22/2010	9:29:36 PM	Main Vac valve opened
3/22/2010	9:29:36 PM	Bypass valve opened
3/22/2010	9:29:36 PM	Helium MFC set to  0.000000
3/22/2010	9:29:36 PM	H2 MFC set to  0.000000
3/22/2010	9:29:36 PM	BCl3 MFC set to  0.000000
3/22/2010	9:29:36 PM	SiCl4 MFC set to  0.000000
3/22/2010	9:29:36 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	9:29:36 PM	Tube furnace set to 0
3/22/2010	9:34:36 PM	H2 valve closed
3/22/2010	9:34:36 PM	BCl3 valve closed
3/22/2010	9:34:36 PM	PH3 valve closed
3/22/2010	9:34:36 PM	SiCl4 pre valve closed
3/22/2010	9:34:36 PM	SiCl4 post valve closed
3/22/2010	9:34:36 PM	Main Vac valve closed
3/22/2010	9:34:36 PM	Bypass valve closed
3/22/2010	9:34:36 PM	Bubbler valve closed
3/22/2010	9:34:36 PM	Helium valve opened
3/22/2010	9:34:36 PM	Helium MFC set to  500.000000
3/22/2010	9:34:36 PM	H2 MFC set to  0.000000
3/22/2010	9:34:36 PM	BCl3 MFC set to  0.000000
3/22/2010	9:34:36 PM	SiCl4 MFC set to  0.000000
3/22/2010	9:34:36 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	9:34:36 PM	Tube furnace set to 0
3/22/2010	9:35:57 PM	Helium valve closed
3/22/2010	9:35:57 PM	H2 valve closed
3/22/2010	9:35:57 PM	BCl3 valve closed
3/22/2010	9:35:57 PM	PH3 valve closed
3/22/2010	9:35:57 PM	SiCl4 pre valve closed
3/22/2010	9:35:57 PM	SiCl4 post valve closed
3/22/2010	9:35:57 PM	Main Vac valve closed
3/22/2010	9:35:57 PM	Bypass valve closed
3/22/2010	9:35:57 PM	Bubbler valve closed
3/22/2010	9:35:57 PM	Helium MFC set to  0.000000
3/22/2010	9:35:57 PM	H2 MFC set to  0.000000
3/22/2010	9:35:57 PM	BCl3 MFC set to  0.000000
3/22/2010	9:35:57 PM	SiCl4 MFC set to  0.000000
3/22/2010	9:35:57 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	9:35:57 PM	Tube furnace set to 0
3/22/2010	9:36:13 PM	Helium valve closed
3/22/2010	9:36:13 PM	H2 valve closed
3/22/2010	9:36:13 PM	BCl3 valve closed
3/22/2010	9:36:13 PM	PH3 valve closed
3/22/2010	9:36:13 PM	SiCl4 pre valve closed
3/22/2010	9:36:13 PM	SiCl4 post valve closed
3/22/2010	9:36:13 PM	Main Vac valve closed
3/22/2010	9:36:13 PM	Bubbler valve closed
3/22/2010	9:36:13 PM	Bypass valve opened
3/22/2010	9:36:13 PM	Helium MFC set to  0.000000
3/22/2010	9:36:13 PM	H2 MFC set to  0.000000
3/22/2010	9:36:13 PM	BCl3 MFC set to  0.000000
3/22/2010	9:36:13 PM	SiCl4 MFC set to  0.000000
3/22/2010	9:36:13 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	9:36:13 PM	Tube furnace set to 0
3/22/2010	9:36:35 PM	Helium valve closed
3/22/2010	9:36:35 PM	H2 valve closed
3/22/2010	9:36:35 PM	BCl3 valve closed
3/22/2010	9:36:35 PM	PH3 valve closed
3/22/2010	9:36:35 PM	SiCl4 pre valve closed
3/22/2010	9:36:35 PM	SiCl4 post valve closed
3/22/2010	9:36:35 PM	Bubbler valve closed
3/22/2010	9:36:35 PM	Main Vac valve opened
3/22/2010	9:36:35 PM	Bypass valve opened
3/22/2010	9:36:35 PM	Helium MFC set to  0.000000
3/22/2010	9:36:35 PM	H2 MFC set to  0.000000
3/22/2010	9:36:35 PM	BCl3 MFC set to  0.000000
3/22/2010	9:36:35 PM	SiCl4 MFC set to  0.000000
3/22/2010	9:36:35 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	9:36:35 PM	Tube furnace set to 0
3/22/2010	9:41:35 PM	H2 valve closed
3/22/2010	9:41:35 PM	BCl3 valve closed
3/22/2010	9:41:35 PM	PH3 valve closed
3/22/2010	9:41:35 PM	SiCl4 pre valve closed
3/22/2010	9:41:35 PM	SiCl4 post valve closed
3/22/2010	9:41:35 PM	Main Vac valve closed
3/22/2010	9:41:35 PM	Bypass valve closed
3/22/2010	9:41:35 PM	Bubbler valve closed
3/22/2010	9:41:35 PM	Helium valve opened
3/22/2010	9:41:35 PM	Helium MFC set to  500.000000
3/22/2010	9:41:35 PM	H2 MFC set to  0.000000
3/22/2010	9:41:35 PM	BCl3 MFC set to  0.000000
3/22/2010	9:41:35 PM	SiCl4 MFC set to  0.000000
3/22/2010	9:41:35 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	9:41:35 PM	Tube furnace set to 0
3/22/2010	9:42:57 PM	Helium valve closed
3/22/2010	9:42:57 PM	H2 valve closed
3/22/2010	9:42:57 PM	BCl3 valve closed
3/22/2010	9:42:57 PM	PH3 valve closed
3/22/2010	9:42:57 PM	SiCl4 pre valve closed
3/22/2010	9:42:57 PM	SiCl4 post valve closed
3/22/2010	9:42:57 PM	Main Vac valve closed
3/22/2010	9:42:57 PM	Bypass valve closed
3/22/2010	9:42:57 PM	Bubbler valve closed
3/22/2010	9:42:57 PM	Helium MFC set to  0.000000
3/22/2010	9:42:57 PM	H2 MFC set to  0.000000
3/22/2010	9:42:57 PM	BCl3 MFC set to  0.000000
3/22/2010	9:42:57 PM	SiCl4 MFC set to  0.000000
3/22/2010	9:42:57 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	9:42:57 PM	Tube furnace set to 0
3/22/2010	9:43:12 PM	Helium valve closed
3/22/2010	9:43:12 PM	H2 valve closed
3/22/2010	9:43:12 PM	BCl3 valve closed
3/22/2010	9:43:12 PM	PH3 valve closed
3/22/2010	9:43:12 PM	SiCl4 pre valve closed
3/22/2010	9:43:12 PM	SiCl4 post valve closed
3/22/2010	9:43:12 PM	Main Vac valve closed
3/22/2010	9:43:12 PM	Bubbler valve closed
3/22/2010	9:43:12 PM	Bypass valve opened
3/22/2010	9:43:12 PM	Helium MFC set to  0.000000
3/22/2010	9:43:12 PM	H2 MFC set to  0.000000
3/22/2010	9:43:12 PM	BCl3 MFC set to  0.000000
3/22/2010	9:43:12 PM	SiCl4 MFC set to  0.000000
3/22/2010	9:43:12 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	9:43:12 PM	Tube furnace set to 0
3/22/2010	9:43:34 PM	Helium valve closed
3/22/2010	9:43:34 PM	H2 valve closed
3/22/2010	9:43:34 PM	BCl3 valve closed
3/22/2010	9:43:34 PM	PH3 valve closed
3/22/2010	9:43:34 PM	SiCl4 pre valve closed
3/22/2010	9:43:34 PM	SiCl4 post valve closed
3/22/2010	9:43:34 PM	Bubbler valve closed
3/22/2010	9:43:34 PM	Main Vac valve opened
3/22/2010	9:43:34 PM	Bypass valve opened
3/22/2010	9:43:34 PM	Helium MFC set to  0.000000
3/22/2010	9:43:34 PM	H2 MFC set to  0.000000
3/22/2010	9:43:34 PM	BCl3 MFC set to  0.000000
3/22/2010	9:43:34 PM	SiCl4 MFC set to  0.000000
3/22/2010	9:43:34 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	9:43:34 PM	Tube furnace set to 0
3/22/2010	9:46:34 PM	Run aborted at 9:46 PM
3/22/2010	9:46:34 PM	Helium valve closed
3/22/2010	9:46:34 PM	H2 valve closed
3/22/2010	9:46:34 PM	BCl3 valve closed
3/22/2010	9:46:34 PM	PH3 valve closed
3/22/2010	9:46:34 PM	SiCl4 pre valve closed
3/22/2010	9:46:34 PM	SiCl4 post valve closed
3/22/2010	9:46:34 PM	Bypass valve closed
3/22/2010	9:46:34 PM	Main Vac valve closed
3/22/2010	9:46:34 PM	Bubbler valve closed
3/22/2010	9:46:34 PM	Helium MFC set to  0.000000
3/22/2010	9:46:34 PM	H2 MFC set to  0.000000
3/22/2010	9:46:34 PM	BCl3 MFC set to  0.000000
3/22/2010	9:46:34 PM	SiCl4 MFC set to  0.000000
3/22/2010	9:46:34 PM	Tube furnace set to 0
3/22/2010	9:46:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/22/2010	9:46:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/22/2010	9:46:56 PM	Recipe started at 9:46 PM
3/22/2010	9:46:56 PM	H2 valve closed
3/22/2010	9:46:56 PM	BCl3 valve closed
3/22/2010	9:46:56 PM	PH3 valve closed
3/22/2010	9:46:56 PM	SiCl4 pre valve closed
3/22/2010	9:46:56 PM	SiCl4 post valve closed
3/22/2010	9:46:56 PM	Main Vac valve closed
3/22/2010	9:46:56 PM	Bypass valve closed
3/22/2010	9:46:56 PM	Bubbler valve closed
3/22/2010	9:46:56 PM	Helium valve opened
3/22/2010	9:46:56 PM	Helium MFC set to  500.000000
3/22/2010	9:46:56 PM	H2 MFC set to  0.000000
3/22/2010	9:46:56 PM	BCl3 MFC set to  0.000000
3/22/2010	9:46:56 PM	SiCl4 MFC set to  0.000000
3/22/2010	9:46:56 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	9:46:56 PM	Tube furnace set to 0
3/22/2010	9:47:19 PM	Run aborted at 9:47 PM
3/22/2010	9:47:19 PM	Helium valve closed
3/22/2010	9:47:19 PM	H2 valve closed
3/22/2010	9:47:19 PM	BCl3 valve closed
3/22/2010	9:47:19 PM	PH3 valve closed
3/22/2010	9:47:19 PM	SiCl4 pre valve closed
3/22/2010	9:47:19 PM	SiCl4 post valve closed
3/22/2010	9:47:19 PM	Bypass valve closed
3/22/2010	9:47:19 PM	Main Vac valve closed
3/22/2010	9:47:19 PM	Bubbler valve closed
3/22/2010	9:47:19 PM	Helium MFC set to  0.000000
3/22/2010	9:47:19 PM	H2 MFC set to  0.000000
3/22/2010	9:47:19 PM	BCl3 MFC set to  0.000000
3/22/2010	9:47:19 PM	SiCl4 MFC set to  0.000000
3/22/2010	9:47:19 PM	Tube furnace set to 0
3/22/2010	9:47:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/22/2010	9:47:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2010	9:47:21 PM	Recipe started at 9:47 PM
3/22/2010	9:47:21 PM	Helium valve closed
3/22/2010	9:47:21 PM	H2 valve closed
3/22/2010	9:47:21 PM	BCl3 valve closed
3/22/2010	9:47:21 PM	PH3 valve closed
3/22/2010	9:47:21 PM	SiCl4 pre valve closed
3/22/2010	9:47:21 PM	SiCl4 post valve closed
3/22/2010	9:47:21 PM	Main Vac valve closed
3/22/2010	9:47:21 PM	Bubbler valve closed
3/22/2010	9:47:21 PM	Bypass valve opened
3/22/2010	9:47:21 PM	Helium MFC set to  0.000000
3/22/2010	9:47:21 PM	H2 MFC set to  0.000000
3/22/2010	9:47:21 PM	BCl3 MFC set to  0.000000
3/22/2010	9:47:21 PM	SiCl4 MFC set to  0.000000
3/22/2010	9:47:21 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	9:47:21 PM	Tube furnace set to 0
3/22/2010	9:47:36 PM	Helium valve closed
3/22/2010	9:47:36 PM	H2 valve closed
3/22/2010	9:47:36 PM	BCl3 valve closed
3/22/2010	9:47:36 PM	PH3 valve closed
3/22/2010	9:47:36 PM	SiCl4 pre valve closed
3/22/2010	9:47:36 PM	SiCl4 post valve closed
3/22/2010	9:47:36 PM	Bubbler valve closed
3/22/2010	9:47:36 PM	Main Vac valve opened
3/22/2010	9:47:36 PM	Bypass valve opened
3/22/2010	9:47:36 PM	Helium MFC set to  0.000000
3/22/2010	9:47:36 PM	H2 MFC set to  0.000000
3/22/2010	9:47:36 PM	BCl3 MFC set to  0.000000
3/22/2010	9:47:36 PM	SiCl4 MFC set to  0.000000
3/22/2010	9:47:36 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	9:47:36 PM	Tube furnace set to 0
3/22/2010	9:47:36 PM	Run finished at 9:47 PM
3/22/2010	9:47:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2010	9:51:23 PM	Recipe started at 9:51 PM
3/22/2010	9:51:23 PM	Helium valve closed
3/22/2010	9:51:23 PM	BCl3 valve closed
3/22/2010	9:51:23 PM	PH3 valve closed
3/22/2010	9:51:23 PM	SiCl4 pre valve closed
3/22/2010	9:51:23 PM	SiCl4 post valve closed
3/22/2010	9:51:23 PM	Main Vac valve closed
3/22/2010	9:51:23 PM	Bypass valve closed
3/22/2010	9:51:23 PM	Bubbler valve closed
3/22/2010	9:51:23 PM	H2 valve opened
3/22/2010	9:51:23 PM	Helium MFC set to  0.000000
3/22/2010	9:51:23 PM	H2 MFC set to  500.000000
3/22/2010	9:51:23 PM	BCl3 MFC set to  0.000000
3/22/2010	9:51:23 PM	SiCl4 MFC set to  0.000000
3/22/2010	9:51:23 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	9:51:23 PM	Tube furnace set to 0
3/22/2010	9:51:32 PM	Helium valve closed
3/22/2010	9:51:32 PM	BCl3 valve closed
3/22/2010	9:51:32 PM	PH3 valve closed
3/22/2010	9:51:32 PM	SiCl4 pre valve closed
3/22/2010	9:51:32 PM	SiCl4 post valve closed
3/22/2010	9:51:32 PM	Main Vac valve closed
3/22/2010	9:51:32 PM	Bypass valve closed
3/22/2010	9:51:32 PM	H2 valve opened
3/22/2010	9:51:32 PM	Bubbler valve opened
3/22/2010	9:51:32 PM	Helium MFC set to  0.000000
3/22/2010	9:51:32 PM	H2 MFC set to  500.000000
3/22/2010	9:51:32 PM	BCl3 MFC set to  0.000000
3/22/2010	9:51:32 PM	SiCl4 MFC set to  0.000000
3/22/2010	9:51:32 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	9:51:32 PM	Tube furnace set to 0
3/22/2010	9:51:32 PM	Helium valve closed
3/22/2010	9:51:32 PM	H2 valve closed
3/22/2010	9:51:32 PM	BCl3 valve closed
3/22/2010	9:51:32 PM	PH3 valve closed
3/22/2010	9:51:32 PM	SiCl4 pre valve closed
3/22/2010	9:51:32 PM	SiCl4 post valve closed
3/22/2010	9:51:32 PM	Main Vac valve closed
3/22/2010	9:51:32 PM	Bubbler valve closed
3/22/2010	9:51:32 PM	Bypass valve opened
3/22/2010	9:51:32 PM	Helium MFC set to  0.000000
3/22/2010	9:51:32 PM	H2 MFC set to  0.000000
3/22/2010	9:51:32 PM	BCl3 MFC set to  0.000000
3/22/2010	9:51:32 PM	SiCl4 MFC set to  0.000000
3/22/2010	9:51:32 PM	Bypass solenoid MFC set to  760.000000
3/22/2010	9:51:32 PM	Tube furnace set to 0
3/22/2010	9:51:32 PM	Baratron reads 958.754690 Torr.  Emergency exit.
3/22/2010	9:51:51 PM	Run aborted at 9:51 PM
3/22/2010	9:51:59 PM	Bubbler valve closed
3/22/2010	9:52:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
3/22/2010	9:52:20 PM	Recipe started at 9:52 PM
3/22/2010	9:52:20 PM	Helium valve closed
3/22/2010	9:52:20 PM	H2 valve closed
3/22/2010	9:52:20 PM	BCl3 valve closed
3/22/2010	9:52:20 PM	PH3 valve closed
3/22/2010	9:52:20 PM	SiCl4 pre valve closed
3/22/2010	9:52:20 PM	SiCl4 post valve closed
3/22/2010	9:52:20 PM	Main Vac valve closed
3/22/2010	9:52:20 PM	Bypass valve closed
3/22/2010	9:52:20 PM	Bubbler valve closed
3/22/2010	9:52:20 PM	Helium MFC set to  0.000000
3/22/2010	9:52:20 PM	H2 MFC set to  0.000000
3/22/2010	9:52:20 PM	BCl3 MFC set to  0.000000
3/22/2010	9:52:20 PM	SiCl4 MFC set to  0.000000
3/22/2010	9:52:20 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	9:52:20 PM	Tube furnace set to 0
3/22/2010	9:52:20 PM	Run finished at 9:52 PM
3/22/2010	9:52:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
3/22/2010	9:52:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2010	9:52:28 PM	Recipe started at 9:52 PM
3/22/2010	9:52:28 PM	Helium valve closed
3/22/2010	9:52:28 PM	H2 valve closed
3/22/2010	9:52:28 PM	BCl3 valve closed
3/22/2010	9:52:28 PM	PH3 valve closed
3/22/2010	9:52:28 PM	SiCl4 pre valve closed
3/22/2010	9:52:28 PM	SiCl4 post valve closed
3/22/2010	9:52:28 PM	Main Vac valve closed
3/22/2010	9:52:28 PM	Bubbler valve closed
3/22/2010	9:52:28 PM	Bypass valve opened
3/22/2010	9:52:28 PM	Helium MFC set to  0.000000
3/22/2010	9:52:28 PM	H2 MFC set to  0.000000
3/22/2010	9:52:28 PM	BCl3 MFC set to  0.000000
3/22/2010	9:52:28 PM	SiCl4 MFC set to  0.000000
3/22/2010	9:52:28 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	9:52:28 PM	Tube furnace set to 0
3/22/2010	9:52:28 PM	Helium valve closed
3/22/2010	9:52:28 PM	H2 valve closed
3/22/2010	9:52:28 PM	BCl3 valve closed
3/22/2010	9:52:28 PM	PH3 valve closed
3/22/2010	9:52:28 PM	SiCl4 pre valve closed
3/22/2010	9:52:28 PM	SiCl4 post valve closed
3/22/2010	9:52:28 PM	Bubbler valve closed
3/22/2010	9:52:28 PM	Main Vac valve opened
3/22/2010	9:52:28 PM	Bypass valve opened
3/22/2010	9:52:28 PM	Helium MFC set to  0.000000
3/22/2010	9:52:28 PM	H2 MFC set to  0.000000
3/22/2010	9:52:28 PM	BCl3 MFC set to  0.000000
3/22/2010	9:52:28 PM	SiCl4 MFC set to  0.000000
3/22/2010	9:52:28 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	9:52:28 PM	Tube furnace set to 0
3/22/2010	9:52:29 PM	Run finished at 9:52 PM
3/22/2010	9:52:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2010	9:53:19 PM	Recipe started at 9:53 PM
3/22/2010	9:53:19 PM	Helium valve closed
3/22/2010	9:53:19 PM	BCl3 valve closed
3/22/2010	9:53:19 PM	PH3 valve closed
3/22/2010	9:53:19 PM	SiCl4 pre valve closed
3/22/2010	9:53:19 PM	SiCl4 post valve closed
3/22/2010	9:53:19 PM	Main Vac valve closed
3/22/2010	9:53:19 PM	Bypass valve closed
3/22/2010	9:53:19 PM	Bubbler valve closed
3/22/2010	9:53:19 PM	H2 valve opened
3/22/2010	9:53:19 PM	Helium MFC set to  0.000000
3/22/2010	9:53:19 PM	H2 MFC set to  500.000000
3/22/2010	9:53:19 PM	BCl3 MFC set to  0.000000
3/22/2010	9:53:19 PM	SiCl4 MFC set to  0.000000
3/22/2010	9:53:19 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	9:53:19 PM	Tube furnace set to 0
3/22/2010	9:54:39 PM	Helium valve closed
3/22/2010	9:54:39 PM	BCl3 valve closed
3/22/2010	9:54:39 PM	PH3 valve closed
3/22/2010	9:54:39 PM	SiCl4 pre valve closed
3/22/2010	9:54:39 PM	SiCl4 post valve closed
3/22/2010	9:54:39 PM	Main Vac valve closed
3/22/2010	9:54:39 PM	Bypass valve closed
3/22/2010	9:54:39 PM	H2 valve opened
3/22/2010	9:54:39 PM	Bubbler valve opened
3/22/2010	9:54:39 PM	Helium MFC set to  0.000000
3/22/2010	9:54:39 PM	H2 MFC set to  500.000000
3/22/2010	9:54:39 PM	BCl3 MFC set to  0.000000
3/22/2010	9:54:39 PM	SiCl4 MFC set to  0.000000
3/22/2010	9:54:39 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	9:54:39 PM	Tube furnace set to 0
3/22/2010	10:14:39 PM	Helium valve closed
3/22/2010	10:14:39 PM	BCl3 valve closed
3/22/2010	10:14:39 PM	PH3 valve closed
3/22/2010	10:14:39 PM	Main Vac valve closed
3/22/2010	10:14:39 PM	Bypass valve closed
3/22/2010	10:14:39 PM	H2 valve opened
3/22/2010	10:14:39 PM	SiCl4 pre valve opened
3/22/2010	10:14:39 PM	SiCl4 post valve opened
3/22/2010	10:14:39 PM	Bubbler valve opened
3/22/2010	10:14:39 PM	Helium MFC set to  0.000000
3/22/2010	10:14:39 PM	H2 MFC set to  500.000000
3/22/2010	10:14:39 PM	BCl3 MFC set to  0.000000
3/22/2010	10:14:39 PM	SiCl4 MFC set to  325.000000
3/22/2010	10:14:39 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	10:14:39 PM	Tube furnace set to 0
3/22/2010	10:14:43 PM	Helium valve closed
3/22/2010	10:14:43 PM	H2 valve closed
3/22/2010	10:14:43 PM	BCl3 valve closed
3/22/2010	10:14:43 PM	PH3 valve closed
3/22/2010	10:14:43 PM	SiCl4 pre valve closed
3/22/2010	10:14:43 PM	SiCl4 post valve closed
3/22/2010	10:14:43 PM	Main Vac valve closed
3/22/2010	10:14:43 PM	Bubbler valve closed
3/22/2010	10:14:43 PM	Bypass valve opened
3/22/2010	10:14:43 PM	Helium MFC set to  0.000000
3/22/2010	10:14:43 PM	H2 MFC set to  0.000000
3/22/2010	10:14:43 PM	BCl3 MFC set to  0.000000
3/22/2010	10:14:43 PM	SiCl4 MFC set to  0.000000
3/22/2010	10:14:43 PM	Bypass solenoid MFC set to  760.000000
3/22/2010	10:14:43 PM	Tube furnace set to 0
3/22/2010	10:14:43 PM	Baratron reads 963.858830 Torr.  Emergency exit.
3/22/2010	10:20:23 PM	Run aborted at 10:20 PM
3/22/2010	10:25:06 PM	Bubbler valve closed
3/22/2010	10:25:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/22/2010	10:25:16 PM	Recipe started at 10:25 PM
3/22/2010	10:25:16 PM	H2 valve closed
3/22/2010	10:25:16 PM	BCl3 valve closed
3/22/2010	10:25:16 PM	PH3 valve closed
3/22/2010	10:25:16 PM	SiCl4 pre valve closed
3/22/2010	10:25:16 PM	SiCl4 post valve closed
3/22/2010	10:25:16 PM	Main Vac valve closed
3/22/2010	10:25:16 PM	Bypass valve closed
3/22/2010	10:25:16 PM	Bubbler valve closed
3/22/2010	10:25:16 PM	Helium valve opened
3/22/2010	10:25:16 PM	Helium MFC set to  500.000000
3/22/2010	10:25:16 PM	H2 MFC set to  0.000000
3/22/2010	10:25:16 PM	BCl3 MFC set to  0.000000
3/22/2010	10:25:16 PM	SiCl4 MFC set to  0.000000
3/22/2010	10:25:16 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	10:25:16 PM	Tube furnace set to 0
3/22/2010	10:26:28 PM	Helium valve closed
3/22/2010	10:26:28 PM	H2 valve closed
3/22/2010	10:26:28 PM	BCl3 valve closed
3/22/2010	10:26:28 PM	PH3 valve closed
3/22/2010	10:26:28 PM	SiCl4 pre valve closed
3/22/2010	10:26:28 PM	SiCl4 post valve closed
3/22/2010	10:26:28 PM	Main Vac valve closed
3/22/2010	10:26:28 PM	Bypass valve closed
3/22/2010	10:26:28 PM	Bubbler valve closed
3/22/2010	10:26:28 PM	Helium MFC set to  0.000000
3/22/2010	10:26:28 PM	H2 MFC set to  0.000000
3/22/2010	10:26:28 PM	BCl3 MFC set to  0.000000
3/22/2010	10:26:28 PM	SiCl4 MFC set to  0.000000
3/22/2010	10:26:28 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	10:26:28 PM	Tube furnace set to 0
3/22/2010	10:26:28 PM	Run finished at 10:26 PM
3/22/2010	10:26:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/22/2010	10:26:37 PM	Helium MFC set to  100.000000
3/22/2010	10:26:40 PM	Helium valve opened
3/22/2010	10:26:56 PM	Bubbler valve opened
3/22/2010	10:27:02 PM	Bubbler valve closed
3/22/2010	10:27:04 PM	Bubbler valve opened
3/22/2010	10:27:06 PM	Bubbler valve closed
3/22/2010	10:27:07 PM	Bubbler valve opened
3/22/2010	10:27:14 PM	Bubbler valve closed
3/22/2010	10:27:15 PM	Helium valve closed
3/22/2010	10:38:01 PM	Helium valve opened
3/22/2010	10:38:04 PM	Helium valve closed
3/22/2010	10:38:32 PM	Recipe started at 10:38 PM
3/22/2010	10:38:32 PM	H2 valve closed
3/22/2010	10:38:32 PM	BCl3 valve closed
3/22/2010	10:38:32 PM	PH3 valve closed
3/22/2010	10:38:32 PM	SiCl4 pre valve closed
3/22/2010	10:38:32 PM	SiCl4 post valve closed
3/22/2010	10:38:32 PM	Main Vac valve closed
3/22/2010	10:38:32 PM	Bypass valve closed
3/22/2010	10:38:32 PM	Bubbler valve closed
3/22/2010	10:38:32 PM	Helium valve opened
3/22/2010	10:38:32 PM	Helium MFC set to  500.000000
3/22/2010	10:38:32 PM	H2 MFC set to  0.000000
3/22/2010	10:38:32 PM	BCl3 MFC set to  0.000000
3/22/2010	10:38:32 PM	SiCl4 MFC set to  0.000000
3/22/2010	10:38:32 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	10:38:32 PM	Tube furnace set to 0
3/22/2010	10:38:39 PM	Helium valve closed
3/22/2010	10:38:39 PM	H2 valve closed
3/22/2010	10:38:39 PM	BCl3 valve closed
3/22/2010	10:38:39 PM	PH3 valve closed
3/22/2010	10:38:39 PM	SiCl4 pre valve closed
3/22/2010	10:38:39 PM	SiCl4 post valve closed
3/22/2010	10:38:39 PM	Main Vac valve closed
3/22/2010	10:38:39 PM	Bypass valve closed
3/22/2010	10:38:39 PM	Bubbler valve closed
3/22/2010	10:38:39 PM	Helium MFC set to  0.000000
3/22/2010	10:38:39 PM	H2 MFC set to  0.000000
3/22/2010	10:38:39 PM	BCl3 MFC set to  0.000000
3/22/2010	10:38:39 PM	SiCl4 MFC set to  0.000000
3/22/2010	10:38:39 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	10:38:39 PM	Tube furnace set to 0
3/22/2010	10:38:40 PM	Run finished at 10:38 PM
3/22/2010	10:38:59 PM	Helium MFC set to  100.000000
3/22/2010	10:38:59 PM	Helium valve opened
3/22/2010	10:39:03 PM	Bubbler valve opened
3/22/2010	10:39:08 PM	Bubbler valve closed
3/22/2010	10:39:09 PM	Bubbler valve opened
3/22/2010	10:39:11 PM	Bubbler valve closed
3/22/2010	10:39:13 PM	Bubbler valve opened
3/22/2010	10:39:17 PM	Bubbler valve closed
3/22/2010	10:39:19 PM	Helium valve closed
3/22/2010	10:39:45 PM	Helium valve opened
3/22/2010	10:39:47 PM	Bubbler valve opened
3/22/2010	10:39:55 PM	Bubbler valve closed
3/22/2010	10:40:09 PM	Bubbler valve opened
3/22/2010	10:40:13 PM	Bubbler valve closed
3/22/2010	10:40:16 PM	Bubbler valve opened
3/22/2010	10:40:21 PM	Bubbler valve closed
3/22/2010	10:40:24 PM	Bubbler valve opened
3/22/2010	10:40:48 PM	Bubbler valve closed
3/22/2010	10:40:55 PM	Bubbler valve opened
3/22/2010	10:40:58 PM	Bubbler valve closed
3/22/2010	10:40:59 PM	Helium valve closed
3/22/2010	10:47:43 PM	Helium valve opened
3/22/2010	10:47:53 PM	Bubbler valve opened
3/22/2010	10:48:00 PM	Bubbler valve closed
3/22/2010	10:48:05 PM	Bubbler valve opened
3/22/2010	10:48:09 PM	Bubbler valve closed
3/22/2010	10:48:17 PM	Bubbler valve opened
3/22/2010	10:50:34 PM	Helium MFC set to  500.000000
3/22/2010	10:51:07 PM	Helium valve closed
3/22/2010	10:51:16 PM	Helium MFC set to  100.000000
3/22/2010	10:51:17 PM	Helium valve opened
3/22/2010	10:51:20 PM	Bubbler valve closed
3/22/2010	10:51:32 PM	Bubbler valve opened
3/22/2010	10:51:46 PM	Bubbler valve closed
3/22/2010	10:51:58 PM	Bubbler valve opened
3/22/2010	10:52:07 PM	Helium MFC set to  500.000000
3/22/2010	10:52:20 PM	Bubbler valve closed
3/22/2010	10:52:23 PM	Bubbler valve opened
3/22/2010	10:52:33 PM	Bubbler valve closed
3/22/2010	10:52:36 PM	Bubbler valve opened
3/22/2010	10:52:43 PM	Helium valve closed
3/22/2010	10:52:51 PM	Helium valve opened
3/22/2010	10:53:11 PM	Bubbler valve closed
3/22/2010	10:53:15 PM	Bubbler valve opened
3/22/2010	10:53:20 PM	Bubbler valve closed
3/22/2010	10:53:25 PM	Bubbler valve opened
3/22/2010	10:53:34 PM	Bubbler valve closed
3/22/2010	10:53:39 PM	Bubbler valve opened
3/22/2010	10:53:51 PM	Bubbler valve closed
3/22/2010	10:53:56 PM	Bubbler valve opened
3/22/2010	10:54:48 PM	Bubbler valve closed
3/22/2010	10:54:52 PM	Bubbler valve opened
3/22/2010	10:56:00 PM	Helium MFC set to  100.000000
3/22/2010	10:56:09 PM	Bubbler valve closed
3/22/2010	10:56:11 PM	Helium valve closed
3/22/2010	10:56:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2010	10:56:15 PM	Recipe started at 10:56 PM
3/22/2010	10:56:15 PM	Helium valve closed
3/22/2010	10:56:15 PM	H2 valve closed
3/22/2010	10:56:15 PM	BCl3 valve closed
3/22/2010	10:56:15 PM	PH3 valve closed
3/22/2010	10:56:15 PM	SiCl4 pre valve closed
3/22/2010	10:56:15 PM	SiCl4 post valve closed
3/22/2010	10:56:15 PM	Main Vac valve closed
3/22/2010	10:56:15 PM	Bubbler valve closed
3/22/2010	10:56:15 PM	Bypass valve opened
3/22/2010	10:56:15 PM	Helium MFC set to  0.000000
3/22/2010	10:56:15 PM	H2 MFC set to  0.000000
3/22/2010	10:56:15 PM	BCl3 MFC set to  0.000000
3/22/2010	10:56:15 PM	SiCl4 MFC set to  0.000000
3/22/2010	10:56:15 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	10:56:15 PM	Tube furnace set to 0
3/22/2010	10:56:38 PM	Helium valve closed
3/22/2010	10:56:38 PM	H2 valve closed
3/22/2010	10:56:38 PM	BCl3 valve closed
3/22/2010	10:56:38 PM	PH3 valve closed
3/22/2010	10:56:38 PM	SiCl4 pre valve closed
3/22/2010	10:56:38 PM	SiCl4 post valve closed
3/22/2010	10:56:38 PM	Bubbler valve closed
3/22/2010	10:56:38 PM	Main Vac valve opened
3/22/2010	10:56:38 PM	Bypass valve opened
3/22/2010	10:56:38 PM	Helium MFC set to  0.000000
3/22/2010	10:56:38 PM	H2 MFC set to  0.000000
3/22/2010	10:56:38 PM	BCl3 MFC set to  0.000000
3/22/2010	10:56:38 PM	SiCl4 MFC set to  0.000000
3/22/2010	10:56:38 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	10:56:38 PM	Tube furnace set to 0
3/22/2010	10:56:38 PM	Run finished at 10:56 PM
3/22/2010	10:56:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2010	11:08:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/22/2010	11:08:51 PM	Recipe started at 11:08 PM
3/22/2010	11:08:51 PM	H2 valve closed
3/22/2010	11:08:51 PM	BCl3 valve closed
3/22/2010	11:08:51 PM	PH3 valve closed
3/22/2010	11:08:51 PM	SiCl4 pre valve closed
3/22/2010	11:08:51 PM	SiCl4 post valve closed
3/22/2010	11:08:51 PM	Main Vac valve closed
3/22/2010	11:08:51 PM	Bypass valve closed
3/22/2010	11:08:51 PM	Bubbler valve closed
3/22/2010	11:08:51 PM	Helium valve opened
3/22/2010	11:08:51 PM	Helium MFC set to  500.000000
3/22/2010	11:08:51 PM	H2 MFC set to  0.000000
3/22/2010	11:08:51 PM	BCl3 MFC set to  0.000000
3/22/2010	11:08:51 PM	SiCl4 MFC set to  0.000000
3/22/2010	11:08:51 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	11:08:51 PM	Tube furnace set to 0
3/22/2010	11:09:10 PM	Helium valve closed
3/22/2010	11:09:10 PM	H2 valve closed
3/22/2010	11:09:10 PM	BCl3 valve closed
3/22/2010	11:09:10 PM	PH3 valve closed
3/22/2010	11:09:10 PM	SiCl4 pre valve closed
3/22/2010	11:09:10 PM	SiCl4 post valve closed
3/22/2010	11:09:10 PM	Main Vac valve closed
3/22/2010	11:09:10 PM	Bypass valve closed
3/22/2010	11:09:10 PM	Bubbler valve closed
3/22/2010	11:09:10 PM	Helium MFC set to  0.000000
3/22/2010	11:09:10 PM	H2 MFC set to  0.000000
3/22/2010	11:09:10 PM	BCl3 MFC set to  0.000000
3/22/2010	11:09:10 PM	SiCl4 MFC set to  0.000000
3/22/2010	11:09:10 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	11:09:10 PM	Tube furnace set to 0
3/22/2010	11:09:10 PM	Run finished at 11:09 PM
3/22/2010	11:09:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/22/2010	11:10:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2010	11:10:57 PM	Recipe started at 11:10 PM
3/22/2010	11:10:57 PM	Helium valve closed
3/22/2010	11:10:57 PM	H2 valve closed
3/22/2010	11:10:57 PM	BCl3 valve closed
3/22/2010	11:10:57 PM	PH3 valve closed
3/22/2010	11:10:57 PM	SiCl4 pre valve closed
3/22/2010	11:10:57 PM	SiCl4 post valve closed
3/22/2010	11:10:57 PM	Main Vac valve closed
3/22/2010	11:10:57 PM	Bubbler valve closed
3/22/2010	11:10:57 PM	Bypass valve opened
3/22/2010	11:10:57 PM	Helium MFC set to  0.000000
3/22/2010	11:10:57 PM	H2 MFC set to  0.000000
3/22/2010	11:10:57 PM	BCl3 MFC set to  0.000000
3/22/2010	11:10:57 PM	SiCl4 MFC set to  0.000000
3/22/2010	11:10:57 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	11:10:57 PM	Tube furnace set to 0
3/22/2010	11:11:42 PM	Helium valve closed
3/22/2010	11:11:42 PM	H2 valve closed
3/22/2010	11:11:42 PM	BCl3 valve closed
3/22/2010	11:11:42 PM	PH3 valve closed
3/22/2010	11:11:42 PM	SiCl4 pre valve closed
3/22/2010	11:11:42 PM	SiCl4 post valve closed
3/22/2010	11:11:42 PM	Bubbler valve closed
3/22/2010	11:11:42 PM	Main Vac valve opened
3/22/2010	11:11:42 PM	Bypass valve opened
3/22/2010	11:11:42 PM	Helium MFC set to  0.000000
3/22/2010	11:11:42 PM	H2 MFC set to  0.000000
3/22/2010	11:11:42 PM	BCl3 MFC set to  0.000000
3/22/2010	11:11:42 PM	SiCl4 MFC set to  0.000000
3/22/2010	11:11:42 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	11:11:42 PM	Tube furnace set to 0
3/22/2010	11:11:43 PM	Run finished at 11:11 PM
3/22/2010	11:11:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2010	11:12:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/22/2010	11:12:43 PM	Recipe started at 11:12 PM
3/22/2010	11:12:43 PM	H2 valve closed
3/22/2010	11:12:43 PM	BCl3 valve closed
3/22/2010	11:12:43 PM	PH3 valve closed
3/22/2010	11:12:43 PM	SiCl4 pre valve closed
3/22/2010	11:12:43 PM	SiCl4 post valve closed
3/22/2010	11:12:43 PM	Main Vac valve closed
3/22/2010	11:12:43 PM	Bypass valve closed
3/22/2010	11:12:43 PM	Bubbler valve closed
3/22/2010	11:12:43 PM	Helium valve opened
3/22/2010	11:12:43 PM	Helium MFC set to  500.000000
3/22/2010	11:12:43 PM	H2 MFC set to  0.000000
3/22/2010	11:12:43 PM	BCl3 MFC set to  0.000000
3/22/2010	11:12:43 PM	SiCl4 MFC set to  0.000000
3/22/2010	11:12:43 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	11:12:43 PM	Tube furnace set to 0
3/22/2010	11:12:59 PM	Run aborted at 11:12 PM
3/22/2010	11:12:59 PM	Helium valve closed
3/22/2010	11:12:59 PM	H2 valve closed
3/22/2010	11:12:59 PM	BCl3 valve closed
3/22/2010	11:12:59 PM	PH3 valve closed
3/22/2010	11:12:59 PM	SiCl4 pre valve closed
3/22/2010	11:12:59 PM	SiCl4 post valve closed
3/22/2010	11:12:59 PM	Bypass valve closed
3/22/2010	11:12:59 PM	Main Vac valve closed
3/22/2010	11:12:59 PM	Bubbler valve closed
3/22/2010	11:12:59 PM	Helium MFC set to  0.000000
3/22/2010	11:12:59 PM	H2 MFC set to  0.000000
3/22/2010	11:12:59 PM	BCl3 MFC set to  0.000000
3/22/2010	11:12:59 PM	SiCl4 MFC set to  0.000000
3/22/2010	11:12:59 PM	Tube furnace set to 0
3/22/2010	11:12:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/22/2010	11:12:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2010	11:13:00 PM	Recipe started at 11:13 PM
3/22/2010	11:13:00 PM	Helium valve closed
3/22/2010	11:13:00 PM	H2 valve closed
3/22/2010	11:13:00 PM	BCl3 valve closed
3/22/2010	11:13:00 PM	PH3 valve closed
3/22/2010	11:13:00 PM	SiCl4 pre valve closed
3/22/2010	11:13:00 PM	SiCl4 post valve closed
3/22/2010	11:13:00 PM	Main Vac valve closed
3/22/2010	11:13:00 PM	Bubbler valve closed
3/22/2010	11:13:00 PM	Bypass valve opened
3/22/2010	11:13:00 PM	Helium MFC set to  0.000000
3/22/2010	11:13:00 PM	H2 MFC set to  0.000000
3/22/2010	11:13:00 PM	BCl3 MFC set to  0.000000
3/22/2010	11:13:00 PM	SiCl4 MFC set to  0.000000
3/22/2010	11:13:00 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	11:13:00 PM	Tube furnace set to 0
3/22/2010	11:13:31 PM	Helium valve closed
3/22/2010	11:13:31 PM	H2 valve closed
3/22/2010	11:13:31 PM	BCl3 valve closed
3/22/2010	11:13:31 PM	PH3 valve closed
3/22/2010	11:13:31 PM	SiCl4 pre valve closed
3/22/2010	11:13:31 PM	SiCl4 post valve closed
3/22/2010	11:13:31 PM	Bubbler valve closed
3/22/2010	11:13:31 PM	Main Vac valve opened
3/22/2010	11:13:31 PM	Bypass valve opened
3/22/2010	11:13:31 PM	Helium MFC set to  0.000000
3/22/2010	11:13:31 PM	H2 MFC set to  0.000000
3/22/2010	11:13:31 PM	BCl3 MFC set to  0.000000
3/22/2010	11:13:31 PM	SiCl4 MFC set to  0.000000
3/22/2010	11:13:31 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	11:13:31 PM	Tube furnace set to 0
3/22/2010	11:13:31 PM	Run finished at 11:13 PM
3/22/2010	11:13:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2010	11:14:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/22/2010	11:14:02 PM	Recipe started at 11:14 PM
3/22/2010	11:14:02 PM	H2 valve closed
3/22/2010	11:14:02 PM	BCl3 valve closed
3/22/2010	11:14:02 PM	PH3 valve closed
3/22/2010	11:14:02 PM	SiCl4 pre valve closed
3/22/2010	11:14:02 PM	SiCl4 post valve closed
3/22/2010	11:14:02 PM	Main Vac valve closed
3/22/2010	11:14:02 PM	Bypass valve closed
3/22/2010	11:14:02 PM	Bubbler valve closed
3/22/2010	11:14:02 PM	Helium valve opened
3/22/2010	11:14:02 PM	Helium MFC set to  500.000000
3/22/2010	11:14:02 PM	H2 MFC set to  0.000000
3/22/2010	11:14:02 PM	BCl3 MFC set to  0.000000
3/22/2010	11:14:02 PM	SiCl4 MFC set to  0.000000
3/22/2010	11:14:02 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	11:14:02 PM	Tube furnace set to 0
3/22/2010	11:14:34 PM	Run aborted at 11:14 PM
3/22/2010	11:14:34 PM	Helium valve closed
3/22/2010	11:14:34 PM	H2 valve closed
3/22/2010	11:14:34 PM	BCl3 valve closed
3/22/2010	11:14:34 PM	PH3 valve closed
3/22/2010	11:14:34 PM	SiCl4 pre valve closed
3/22/2010	11:14:34 PM	SiCl4 post valve closed
3/22/2010	11:14:34 PM	Bypass valve closed
3/22/2010	11:14:34 PM	Main Vac valve closed
3/22/2010	11:14:34 PM	Bubbler valve closed
3/22/2010	11:14:34 PM	Helium MFC set to  0.000000
3/22/2010	11:14:34 PM	H2 MFC set to  0.000000
3/22/2010	11:14:34 PM	BCl3 MFC set to  0.000000
3/22/2010	11:14:34 PM	SiCl4 MFC set to  0.000000
3/22/2010	11:14:34 PM	Tube furnace set to 0
3/22/2010	11:14:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/22/2010	11:14:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2010	11:14:36 PM	Recipe started at 11:14 PM
3/22/2010	11:14:36 PM	Helium valve closed
3/22/2010	11:14:36 PM	H2 valve closed
3/22/2010	11:14:36 PM	BCl3 valve closed
3/22/2010	11:14:36 PM	PH3 valve closed
3/22/2010	11:14:36 PM	SiCl4 pre valve closed
3/22/2010	11:14:36 PM	SiCl4 post valve closed
3/22/2010	11:14:36 PM	Main Vac valve closed
3/22/2010	11:14:36 PM	Bubbler valve closed
3/22/2010	11:14:36 PM	Bypass valve opened
3/22/2010	11:14:36 PM	Helium MFC set to  0.000000
3/22/2010	11:14:36 PM	H2 MFC set to  0.000000
3/22/2010	11:14:36 PM	BCl3 MFC set to  0.000000
3/22/2010	11:14:36 PM	SiCl4 MFC set to  0.000000
3/22/2010	11:14:36 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	11:14:36 PM	Tube furnace set to 0
3/22/2010	11:14:53 PM	Run aborted at 11:14 PM
3/22/2010	11:14:53 PM	Helium valve closed
3/22/2010	11:14:53 PM	H2 valve closed
3/22/2010	11:14:53 PM	BCl3 valve closed
3/22/2010	11:14:53 PM	PH3 valve closed
3/22/2010	11:14:54 PM	SiCl4 pre valve closed
3/22/2010	11:14:54 PM	SiCl4 post valve closed
3/22/2010	11:14:54 PM	Bypass valve closed
3/22/2010	11:14:54 PM	Main Vac valve closed
3/22/2010	11:14:54 PM	Bubbler valve closed
3/22/2010	11:14:54 PM	Helium MFC set to  0.000000
3/22/2010	11:14:54 PM	H2 MFC set to  0.000000
3/22/2010	11:14:54 PM	BCl3 MFC set to  0.000000
3/22/2010	11:14:54 PM	SiCl4 MFC set to  0.000000
3/22/2010	11:14:54 PM	Tube furnace set to 0
3/22/2010	11:14:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2010	11:14:57 PM	Bypass valve closed
3/22/2010	11:15:02 PM	Bypass valve opened
3/22/2010	11:15:12 PM	Bypass valve closed
3/22/2010	11:15:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/22/2010	11:15:14 PM	Recipe started at 11:15 PM
3/22/2010	11:15:14 PM	H2 valve closed
3/22/2010	11:15:14 PM	BCl3 valve closed
3/22/2010	11:15:14 PM	PH3 valve closed
3/22/2010	11:15:14 PM	SiCl4 pre valve closed
3/22/2010	11:15:14 PM	SiCl4 post valve closed
3/22/2010	11:15:14 PM	Main Vac valve closed
3/22/2010	11:15:14 PM	Bypass valve closed
3/22/2010	11:15:14 PM	Bubbler valve closed
3/22/2010	11:15:14 PM	Helium valve opened
3/22/2010	11:15:14 PM	Helium MFC set to  500.000000
3/22/2010	11:15:14 PM	H2 MFC set to  0.000000
3/22/2010	11:15:14 PM	BCl3 MFC set to  0.000000
3/22/2010	11:15:14 PM	SiCl4 MFC set to  0.000000
3/22/2010	11:15:14 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	11:15:14 PM	Tube furnace set to 0
3/22/2010	11:15:20 PM	Run aborted at 11:15 PM
3/22/2010	11:15:20 PM	Helium valve closed
3/22/2010	11:15:20 PM	H2 valve closed
3/22/2010	11:15:20 PM	BCl3 valve closed
3/22/2010	11:15:20 PM	PH3 valve closed
3/22/2010	11:15:20 PM	SiCl4 pre valve closed
3/22/2010	11:15:20 PM	SiCl4 post valve closed
3/22/2010	11:15:20 PM	Bypass valve closed
3/22/2010	11:15:20 PM	Main Vac valve closed
3/22/2010	11:15:20 PM	Bubbler valve closed
3/22/2010	11:15:20 PM	Helium MFC set to  0.000000
3/22/2010	11:15:20 PM	H2 MFC set to  0.000000
3/22/2010	11:15:20 PM	BCl3 MFC set to  0.000000
3/22/2010	11:15:20 PM	SiCl4 MFC set to  0.000000
3/22/2010	11:15:20 PM	Tube furnace set to 0
3/22/2010	11:15:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/22/2010	11:15:32 PM	Program started after a nonstandard shutdown
3/22/2010	11:15:32 PM	Helium valve closed
3/22/2010	11:15:32 PM	H2 valve closed
3/22/2010	11:15:32 PM	BCl3 valve closed
3/22/2010	11:15:32 PM	PH3 valve closed
3/22/2010	11:15:32 PM	SiCl4 pre valve closed
3/22/2010	11:15:32 PM	SiCl4 post valve closed
3/22/2010	11:15:32 PM	Main Vac valve closed
3/22/2010	11:15:32 PM	Bypass valve closed
3/22/2010	11:15:32 PM	Bubbler valve closed
3/22/2010	11:15:32 PM	Helium MFC set to  0.000000
3/22/2010	11:15:32 PM	H2 MFC set to  0.000000
3/22/2010	11:15:32 PM	BCl3 MFC set to  0.000000
3/22/2010	11:15:32 PM	SiCl4 MFC set to  0.000000
3/22/2010	11:15:32 PM	Bypass solenoid MFC set to  760.000000
3/22/2010	11:15:32 PM	Tube furnace set to 0
3/22/2010	11:15:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/22/2010	11:15:38 PM	Recipe started at 11:15 PM
3/22/2010	11:15:38 PM	H2 valve closed
3/22/2010	11:15:38 PM	BCl3 valve closed
3/22/2010	11:15:38 PM	PH3 valve closed
3/22/2010	11:15:38 PM	SiCl4 pre valve closed
3/22/2010	11:15:38 PM	SiCl4 post valve closed
3/22/2010	11:15:38 PM	Main Vac valve closed
3/22/2010	11:15:38 PM	Bypass valve closed
3/22/2010	11:15:38 PM	Bubbler valve closed
3/22/2010	11:15:38 PM	Helium valve opened
3/22/2010	11:15:38 PM	Helium MFC set to  500.000000
3/22/2010	11:15:38 PM	H2 MFC set to  0.000000
3/22/2010	11:15:38 PM	BCl3 MFC set to  0.000000
3/22/2010	11:15:38 PM	SiCl4 MFC set to  0.000000
3/22/2010	11:15:38 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	11:15:38 PM	Tube furnace set to 0
3/22/2010	11:15:39 PM	Helium valve closed
3/22/2010	11:15:39 PM	H2 valve closed
3/22/2010	11:15:39 PM	BCl3 valve closed
3/22/2010	11:15:39 PM	PH3 valve closed
3/22/2010	11:15:39 PM	SiCl4 pre valve closed
3/22/2010	11:15:39 PM	SiCl4 post valve closed
3/22/2010	11:15:39 PM	Main Vac valve closed
3/22/2010	11:15:39 PM	Bypass valve closed
3/22/2010	11:15:39 PM	Bubbler valve closed
3/22/2010	11:15:39 PM	Helium MFC set to  0.000000
3/22/2010	11:15:39 PM	H2 MFC set to  0.000000
3/22/2010	11:15:39 PM	BCl3 MFC set to  0.000000
3/22/2010	11:15:39 PM	SiCl4 MFC set to  0.000000
3/22/2010	11:15:39 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	11:15:39 PM	Tube furnace set to 0
3/22/2010	11:15:40 PM	Run finished at 11:15 PM
3/22/2010	11:15:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/22/2010	11:15:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2010	11:15:44 PM	Recipe started at 11:15 PM
3/22/2010	11:15:44 PM	Helium valve closed
3/22/2010	11:15:44 PM	H2 valve closed
3/22/2010	11:15:44 PM	BCl3 valve closed
3/22/2010	11:15:44 PM	PH3 valve closed
3/22/2010	11:15:44 PM	SiCl4 pre valve closed
3/22/2010	11:15:44 PM	SiCl4 post valve closed
3/22/2010	11:15:44 PM	Main Vac valve closed
3/22/2010	11:15:44 PM	Bubbler valve closed
3/22/2010	11:15:44 PM	Bypass valve opened
3/22/2010	11:15:44 PM	Helium MFC set to  0.000000
3/22/2010	11:15:44 PM	H2 MFC set to  0.000000
3/22/2010	11:15:44 PM	BCl3 MFC set to  0.000000
3/22/2010	11:15:44 PM	SiCl4 MFC set to  0.000000
3/22/2010	11:15:44 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	11:15:44 PM	Tube furnace set to 0
3/22/2010	11:16:10 PM	Helium valve closed
3/22/2010	11:16:10 PM	H2 valve closed
3/22/2010	11:16:10 PM	BCl3 valve closed
3/22/2010	11:16:10 PM	PH3 valve closed
3/22/2010	11:16:10 PM	SiCl4 pre valve closed
3/22/2010	11:16:10 PM	SiCl4 post valve closed
3/22/2010	11:16:10 PM	Bubbler valve closed
3/22/2010	11:16:10 PM	Main Vac valve opened
3/22/2010	11:16:10 PM	Bypass valve opened
3/22/2010	11:16:10 PM	Helium MFC set to  0.000000
3/22/2010	11:16:10 PM	H2 MFC set to  0.000000
3/22/2010	11:16:10 PM	BCl3 MFC set to  0.000000
3/22/2010	11:16:10 PM	SiCl4 MFC set to  0.000000
3/22/2010	11:16:10 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	11:16:10 PM	Tube furnace set to 0
3/22/2010	11:16:10 PM	Run finished at 11:16 PM
3/22/2010	11:16:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2010	11:16:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/22/2010	11:16:53 PM	Recipe started at 11:16 PM
3/22/2010	11:16:53 PM	H2 valve closed
3/22/2010	11:16:53 PM	BCl3 valve closed
3/22/2010	11:16:53 PM	PH3 valve closed
3/22/2010	11:16:53 PM	SiCl4 pre valve closed
3/22/2010	11:16:53 PM	SiCl4 post valve closed
3/22/2010	11:16:53 PM	Main Vac valve closed
3/22/2010	11:16:53 PM	Bypass valve closed
3/22/2010	11:16:53 PM	Bubbler valve closed
3/22/2010	11:16:53 PM	Helium valve opened
3/22/2010	11:16:53 PM	Helium MFC set to  500.000000
3/22/2010	11:16:53 PM	H2 MFC set to  0.000000
3/22/2010	11:16:53 PM	BCl3 MFC set to  0.000000
3/22/2010	11:16:53 PM	SiCl4 MFC set to  0.000000
3/22/2010	11:16:53 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	11:16:53 PM	Tube furnace set to 0
3/22/2010	11:18:12 PM	Helium valve closed
3/22/2010	11:18:12 PM	H2 valve closed
3/22/2010	11:18:12 PM	BCl3 valve closed
3/22/2010	11:18:12 PM	PH3 valve closed
3/22/2010	11:18:12 PM	SiCl4 pre valve closed
3/22/2010	11:18:12 PM	SiCl4 post valve closed
3/22/2010	11:18:12 PM	Main Vac valve closed
3/22/2010	11:18:12 PM	Bypass valve closed
3/22/2010	11:18:12 PM	Bubbler valve closed
3/22/2010	11:18:12 PM	Helium MFC set to  0.000000
3/22/2010	11:18:12 PM	H2 MFC set to  0.000000
3/22/2010	11:18:12 PM	BCl3 MFC set to  0.000000
3/22/2010	11:18:12 PM	SiCl4 MFC set to  0.000000
3/22/2010	11:18:12 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	11:18:12 PM	Tube furnace set to 0
3/22/2010	11:18:13 PM	Run finished at 11:18 PM
3/22/2010	11:18:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/22/2010	11:18:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2010	11:18:17 PM	Recipe started at 11:18 PM
3/22/2010	11:18:17 PM	Helium valve closed
3/22/2010	11:18:17 PM	H2 valve closed
3/22/2010	11:18:17 PM	BCl3 valve closed
3/22/2010	11:18:17 PM	PH3 valve closed
3/22/2010	11:18:17 PM	SiCl4 pre valve closed
3/22/2010	11:18:17 PM	SiCl4 post valve closed
3/22/2010	11:18:17 PM	Main Vac valve closed
3/22/2010	11:18:17 PM	Bubbler valve closed
3/22/2010	11:18:17 PM	Bypass valve opened
3/22/2010	11:18:17 PM	Helium MFC set to  0.000000
3/22/2010	11:18:17 PM	H2 MFC set to  0.000000
3/22/2010	11:18:17 PM	BCl3 MFC set to  0.000000
3/22/2010	11:18:17 PM	SiCl4 MFC set to  0.000000
3/22/2010	11:18:17 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	11:18:17 PM	Tube furnace set to 0
3/22/2010	11:19:00 PM	Helium valve closed
3/22/2010	11:19:00 PM	H2 valve closed
3/22/2010	11:19:00 PM	BCl3 valve closed
3/22/2010	11:19:00 PM	PH3 valve closed
3/22/2010	11:19:00 PM	SiCl4 pre valve closed
3/22/2010	11:19:00 PM	SiCl4 post valve closed
3/22/2010	11:19:00 PM	Bubbler valve closed
3/22/2010	11:19:00 PM	Main Vac valve opened
3/22/2010	11:19:00 PM	Bypass valve opened
3/22/2010	11:19:00 PM	Helium MFC set to  0.000000
3/22/2010	11:19:00 PM	H2 MFC set to  0.000000
3/22/2010	11:19:00 PM	BCl3 MFC set to  0.000000
3/22/2010	11:19:00 PM	SiCl4 MFC set to  0.000000
3/22/2010	11:19:00 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	11:19:00 PM	Tube furnace set to 0
3/22/2010	11:19:00 PM	Run finished at 11:19 PM
3/22/2010	11:19:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2010	11:20:36 PM	Recipe started at 11:20 PM
3/22/2010	11:20:36 PM	Helium valve closed
3/22/2010	11:20:36 PM	BCl3 valve closed
3/22/2010	11:20:36 PM	PH3 valve closed
3/22/2010	11:20:36 PM	SiCl4 pre valve closed
3/22/2010	11:20:36 PM	SiCl4 post valve closed
3/22/2010	11:20:36 PM	Main Vac valve closed
3/22/2010	11:20:36 PM	Bypass valve closed
3/22/2010	11:20:36 PM	Bubbler valve closed
3/22/2010	11:20:36 PM	H2 valve opened
3/22/2010	11:20:36 PM	Helium MFC set to  0.000000
3/22/2010	11:20:36 PM	H2 MFC set to  500.000000
3/22/2010	11:20:36 PM	BCl3 MFC set to  0.000000
3/22/2010	11:20:36 PM	SiCl4 MFC set to  0.000000
3/22/2010	11:20:36 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	11:20:36 PM	Tube furnace set to 0
3/22/2010	11:21:56 PM	Helium valve closed
3/22/2010	11:21:56 PM	BCl3 valve closed
3/22/2010	11:21:56 PM	PH3 valve closed
3/22/2010	11:21:56 PM	SiCl4 pre valve closed
3/22/2010	11:21:56 PM	SiCl4 post valve closed
3/22/2010	11:21:56 PM	Main Vac valve closed
3/22/2010	11:21:56 PM	Bypass valve closed
3/22/2010	11:21:56 PM	H2 valve opened
3/22/2010	11:21:56 PM	Bubbler valve opened
3/22/2010	11:21:56 PM	Helium MFC set to  0.000000
3/22/2010	11:21:56 PM	H2 MFC set to  500.000000
3/22/2010	11:21:56 PM	BCl3 MFC set to  0.000000
3/22/2010	11:21:56 PM	SiCl4 MFC set to  0.000000
3/22/2010	11:21:56 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	11:21:56 PM	Tube furnace set to 0
3/22/2010	11:22:10 PM	Helium valve closed
3/22/2010	11:22:10 PM	H2 valve closed
3/22/2010	11:22:10 PM	BCl3 valve closed
3/22/2010	11:22:10 PM	PH3 valve closed
3/22/2010	11:22:10 PM	SiCl4 pre valve closed
3/22/2010	11:22:10 PM	SiCl4 post valve closed
3/22/2010	11:22:10 PM	Main Vac valve closed
3/22/2010	11:22:10 PM	Bubbler valve closed
3/22/2010	11:22:10 PM	Bypass valve opened
3/22/2010	11:22:10 PM	Helium MFC set to  0.000000
3/22/2010	11:22:10 PM	H2 MFC set to  0.000000
3/22/2010	11:22:10 PM	BCl3 MFC set to  0.000000
3/22/2010	11:22:10 PM	SiCl4 MFC set to  0.000000
3/22/2010	11:22:10 PM	Bypass solenoid MFC set to  760.000000
3/22/2010	11:22:10 PM	Tube furnace set to 0
3/22/2010	11:22:10 PM	Baratron reads 902.609148 Torr.  Emergency exit.
3/22/2010	11:22:15 PM	Run aborted at 11:22 PM
3/22/2010	11:22:15 PM	Helium valve closed
3/22/2010	11:22:15 PM	H2 valve closed
3/22/2010	11:22:15 PM	BCl3 valve closed
3/22/2010	11:22:15 PM	PH3 valve closed
3/22/2010	11:22:15 PM	SiCl4 pre valve closed
3/22/2010	11:22:15 PM	SiCl4 post valve closed
3/22/2010	11:22:15 PM	Main Vac valve closed
3/22/2010	11:22:15 PM	Bubbler valve closed
3/22/2010	11:22:15 PM	Bypass valve opened
3/22/2010	11:22:15 PM	Helium MFC set to  0.000000
3/22/2010	11:22:15 PM	H2 MFC set to  0.000000
3/22/2010	11:22:15 PM	BCl3 MFC set to  0.000000
3/22/2010	11:22:15 PM	SiCl4 MFC set to  0.000000
3/22/2010	11:22:15 PM	Bypass solenoid MFC set to  760.000000
3/22/2010	11:22:15 PM	Tube furnace set to 0
3/22/2010	11:22:15 PM	Baratron reads 908.734117 Torr.  Emergency exit.
3/22/2010	11:22:18 PM	Program exited cleanly
3/22/2010	11:22:45 PM	Program started normally
3/22/2010	11:22:45 PM	Helium valve closed
3/22/2010	11:22:45 PM	H2 valve closed
3/22/2010	11:22:45 PM	BCl3 valve closed
3/22/2010	11:22:45 PM	PH3 valve closed
3/22/2010	11:22:45 PM	SiCl4 pre valve closed
3/22/2010	11:22:45 PM	SiCl4 post valve closed
3/22/2010	11:22:45 PM	Main Vac valve closed
3/22/2010	11:22:45 PM	Bypass valve closed
3/22/2010	11:22:45 PM	Bubbler valve closed
3/22/2010	11:22:45 PM	Helium MFC set to  0.000000
3/22/2010	11:22:45 PM	H2 MFC set to  0.000000
3/22/2010	11:22:45 PM	BCl3 MFC set to  0.000000
3/22/2010	11:22:45 PM	SiCl4 MFC set to  0.000000
3/22/2010	11:22:45 PM	Bypass solenoid MFC set to  760.000000
3/22/2010	11:22:45 PM	Tube furnace set to 0
3/22/2010	11:22:50 PM	Bypass valve opened
3/22/2010	11:22:53 PM	Main Vac valve opened
3/22/2010	11:23:13 PM	Main Vac valve closed
3/22/2010	11:23:14 PM	Bypass valve closed
3/22/2010	11:23:25 PM	Recipe started at 11:23 PM
3/22/2010	11:23:25 PM	Helium valve closed
3/22/2010	11:23:25 PM	BCl3 valve closed
3/22/2010	11:23:25 PM	PH3 valve closed
3/22/2010	11:23:25 PM	SiCl4 pre valve closed
3/22/2010	11:23:25 PM	SiCl4 post valve closed
3/22/2010	11:23:25 PM	Main Vac valve closed
3/22/2010	11:23:25 PM	Bypass valve closed
3/22/2010	11:23:25 PM	Bubbler valve closed
3/22/2010	11:23:25 PM	H2 valve opened
3/22/2010	11:23:25 PM	Helium MFC set to  0.000000
3/22/2010	11:23:25 PM	H2 MFC set to  500.000000
3/22/2010	11:23:25 PM	BCl3 MFC set to  0.000000
3/22/2010	11:23:25 PM	SiCl4 MFC set to  0.000000
3/22/2010	11:23:25 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	11:23:25 PM	Tube furnace set to 0
3/22/2010	11:24:39 PM	Helium valve closed
3/22/2010	11:24:39 PM	BCl3 valve closed
3/22/2010	11:24:39 PM	PH3 valve closed
3/22/2010	11:24:39 PM	SiCl4 pre valve closed
3/22/2010	11:24:39 PM	SiCl4 post valve closed
3/22/2010	11:24:39 PM	Main Vac valve closed
3/22/2010	11:24:39 PM	Bypass valve closed
3/22/2010	11:24:39 PM	H2 valve opened
3/22/2010	11:24:39 PM	Bubbler valve opened
3/22/2010	11:24:39 PM	Helium MFC set to  0.000000
3/22/2010	11:24:39 PM	H2 MFC set to  500.000000
3/22/2010	11:24:39 PM	BCl3 MFC set to  0.000000
3/22/2010	11:24:39 PM	SiCl4 MFC set to  0.000000
3/22/2010	11:24:39 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	11:24:39 PM	Tube furnace set to 0
3/22/2010	11:44:40 PM	H2 valve closed
3/22/2010	11:44:40 PM	BCl3 valve closed
3/22/2010	11:44:40 PM	PH3 valve closed
3/22/2010	11:44:40 PM	SiCl4 pre valve closed
3/22/2010	11:44:40 PM	SiCl4 post valve closed
3/22/2010	11:44:40 PM	Main Vac valve closed
3/22/2010	11:44:40 PM	Bypass valve closed
3/22/2010	11:44:40 PM	Helium valve opened
3/22/2010	11:44:40 PM	Bubbler valve opened
3/22/2010	11:44:40 PM	Helium MFC set to  500.000000
3/22/2010	11:44:40 PM	H2 MFC set to  0.000000
3/22/2010	11:44:40 PM	BCl3 MFC set to  0.000000
3/22/2010	11:44:40 PM	SiCl4 MFC set to  0.000000
3/22/2010	11:44:40 PM	Bypass solenoid MFC set to  0.000000
3/22/2010	11:44:40 PM	Tube furnace set to 0
